|
|
|
|
|
| |
|
|
Ordering Example |
|
ATS11 |
010 |
|
-H |
-M |
-80P |
-S50 |
-NC |
-E2000H |
-NO
BRK |
|
Series |
Travel |
Construction |
Waycover Option |
Mounting and Grid Pattern |
Drive Screw |
Motor |
Limits |
Rotary Encoder |
Options |
|
|
010
015
020
030
040
050
060 |
-VAC3
-VAC6
-Nickel |
-H |
-M
-U |
-80P |
-S50
-S50-H |
-NC
-NO |
-E2000H
-E1000AS |
-P02
-BRK
-NO BRK |
ATS1100-H Series Linear Ball-Screw
Stage |
| ATS11010 |
100 mm (4 in) travel
stage with ground ball screw, recirculating bearings, and limits |
| ATS11015 |
150 mm (6 in) travel
stage with ground ball screw, recirculating bearings, and limits |
| ATS11020 |
200 mm (8 in) travel
stage with ground ball screw, recirculating bearings, and limits |
| ATS11030 |
300 mm (12 in) travel
stage with ground ball screw, recirculating bearings, and limits |
| ATS11040 |
400 mm (16 in) travel
stage with ground ball screw, recirculating bearings, and limits |
| ATS11050 |
500 mm (20 in) travel
stage with ground ball screw, recirculating bearings, and limits |
| ATS11060 |
600 mm (24 in) travel
stage with ground ball screw, recirculating bearings, and limits |
|
Stage Construction Options |
| -VAC3 |
Vacuum preparation
of stage to 10-3 torr |
| -VAC6 |
Vacuum preparation
of stage to 10-6 torr |
| -Nickel |
Electroless nickel
finish |
|
Waycover |
| -H |
Stage sealing system
with waycover |
|
Mounting and Grid Pattern |
| -M |
Metric dimension
mounting pattern and holes |
-U |
English dimension mounting pattern and holes |
|
Drive Screw |
| -80P |
8 mm/per rev precision-ground
ball screw |
|
Motor |
| -S50 |
Integral slotless,
brushless servomotor; requires cable (S50-52-A) |
-S50-H |
Integral slotless, brushless servomotor with hall
effect sensor; requires cable (S50-52-AH) |
| Note: -S50-H option required
with -E1000AS rotary encoder option. |
|
Limits |
| -NC |
Normally-closed end
of travel limit switches (standard) |
| -NO |
Normally-open end
of travel limit switches |
|
Rotary Encoder |
| -E2000H |
2000-line line driver
output rotary encoder (standard) |
| -E1000AS |
1000-line amplified
sine output rotary encoder |
|
Options |
| -P02 |
Air-purge pressure
fittings |
| -BRK |
24 VDC spring-set
motor brake |
| -NO BRK |
No brake |
|
Accessories (to be ordered
as separate line item) |
| ALIGNMENT-NPA |
Non-precision XY
assembly |
| ALIGNMENT-NPAZ |
Non-precision XZ or
YZ assembly with right angle bracket |
| ALIGNMENT-PA10 |
XY assembly; 10 arc
sec orthogonal |
| ALIGNMENT-PA10Z |
XZ or YZ assembly
with right angle bracket; 10 arc second orthogonal |
| ALIGNMENT-PA5 |
XY assembly; 5 arc
sec orthogonal |
| ALIGNMENT-PA5Z |
XZ or YZ assembly
with right angle bracket; 5 arc second orthogonal |
| HDZ10M |
Metric right-angle
bracket |
| HALAR |
High-accuracy system
- linear error correction for accuracy and repeatability |
| *Internal
signal multipliers available with A3200 amplifier products. |
|
|
|