|
Total Travel |
100 mm |
150 mm |
200 mm |
300 mm |
400 mm |
500 mm |
600 mm |
|
Drive System |
Precision Ball Screw |
| Bus
Voltage |
Up
to 160 VDC |
| Continuous
Current |
Apk |
Up
to 2.3 A |
| Arms |
Up
to 1.6 A |
| Feedback |
Noncontact
Rotary Encoder (2000 Line) |
| Resolution |
8 mm/rev |
1.0
µm @ 2000 steps/rev Motor Resolution |
| Maximum
Travel Speed(1) |
400
mm/s (320 mm/s with E1000AS) |
| Maximum
Load(2) |
50
kg (horizontal); 15 kg (vertical); 35 kg (side) |
|
Accuracy |
Standard |
±4 µm |
±6 µm |
±8 µm |
±12 µm |
±16 µm |
±20 µm |
±24 µm |
|
HALAR(3) |
±1.0 µm |
|
Repeatability (Bidirectional) |
±1.0 µm standard; ±0.5 µm with HALAR |
|
Straightness and Flatness |
±2.4 µm |
±3.6 µm |
±4.8 µm |
±7.2 µm |
±9.6 µm |
±12.0 µm |
±14.4 µm |
|
Stage Weight with Motor and Brake |
8.0 (17.7) |
8.7 (19.1) |
9.4 (20.6) |
11.0 (24.2) |
12.3 (27.1) |
13.9 (30.5) |
15.4 (33.9) |
|
Construction |
Black Anodized Aluminum Body with Hardcoated Tabletop |