The ATS150 series motor-driven linear stages provide
the high resolution and repeatability required for semiconductor
wafer testing and fabrication, automated microscope inspection
systems, and precision micromachining applications.
Construction Features
ATS150 series stages are machined from a special cast aluminum
alloy to provide a high strength-to-weight ratio, and long-term
stability. The base is a box design that provides exceptional
stiffness and stability.
ATS150 series stages employ a precision-ground ball screw that
is pre-loaded to eliminate backlash, and its nut has wipers to
prevent contamination and maintain high accuracy throughout the
life of the stage. High quality, pre-loaded duplex bearings are
used to eliminate axial play.
All ATS150 series stages incorporate Linear Motion Guide (LMG)
bearings to provide high load capability and high stiffness. The
LMG design provides a compact stage with continuous carriage support
over the entire travel and good cantilevered load capability.
Integral wipers on the bearing trucks help ensure stage travel
life. Highly accurate optical limit switches and end stops are
also standard.
Integral bellows-type waycovers protect the drive and bearing
system from contamination. Metal surfaces are protected with an
attractive clear anodized finish. Both metric (standard) and English
mounting and bolt-hole patterns are available.
Linear Encoder
A precision noncontact linear encoder is an option. The encoder
is mounted internal to the stage, protecting it from external
contaminants and debris.
Motors and Drives
Included with all ATS150 series stages are Aerotech’s BMS
series brushless rotary motors. This motor has all of the advantages
of a brushless motor – high acceleration, no brushes to
wear, and lower heating – yet has zero cogging for extremely
smooth motion and accuracy. Aerotech manufactures a wide range
of matching drives and controls to provide a fully integrated
and optimized motion solution.
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