| Total Travel |
100 mm |
200 mm |
300 mm |
|
Drive System |
Super Precision Ground Ball Screw (P), Precision Ball Screw
(B), Lead Screw (L);
Brushless Servomotor (BMS60-A-D25-E1000H) |
| Bus
Voltage |
Up
to 160 VDC |
| Continuous
Current |
Apk |
Up
to 2.3 A |
| Arms |
Up
to 1.6 A |
| Feedback |
Noncontact
Rotary Encoder (1000 line) |
|
Resolution |
4 mm/rev Lead |
1.0 µm (40 µin) @ 4000 steps/rev Motor Resolution |
|
0.2 in/rev Lead |
1.25 µm (50 µin) @ 4000 steps/rev Motor Resolution |
|
Maximum Travel Speed(1) |
4 mm/rev Lead |
140 mm/s (5.5 in/s) |
|
0.2 in/rev Lead |
180 mm/s (7 in/s) |
Maximum
Load(2) |
Horizontal |
70.0 kg (154.3
lb) |
115.0 kg
(253.5 lb) |
135.0 kg (297.6 lb) |
|
Vertical |
25.0 kg (55.1 lb) |
35.0 kg (77.2 lb) |
45.0 kg (99.2 lb) |
|
Side |
45.0 kg (99.2 lb) |
|
Accuracy |
Super Precision
Ball Screw |
±4
µm |
±8
µm |
±12
µm |
|
Precision Ball Screw |
±8 µm |
±16
µm |
±24
µm |
|
Lead Screw |
±16 µm |
±32
µm |
±48
µm |
|
Repeatability (Bidirectional) |
Super Precision
Ball Screw |
±1.0 µm (40 µin/in) |
|
Precision Ball Screw |
±2.0 µm (80 µin/in) |
|
Lead Screw |
±4.0 µm (160 µin/in) |
| Straightness
and Flatness |
±4
µm |
±8
µm |
±12
µm |
|
Nominal Stage Weight |
Less Motor |
3.1 kg (6.8
lb) |
5.0 kg (11.0
lb) |
7.0 kg (15.4 lb) |
|
With Motor |
4.2 kg (9.3 lb) |
6.1 kg (13.4 lb) |
8.1 kg (17.9 lb) |
| Construction |
Aluminum Body; Black Anodize Finish |