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| Total Travel |
100 mm (4 in) |
150 mm (6 in) |
200 mm (8 in) |
250 mm (10 in) |
| Drive System |
Super Precision Ground Ball Screw/Brushless Servomotor (BMS60-A-D25-E1000H) |
| Bus Voltage |
Up
to 160 VDC |
| Continuous
Current |
Apk |
Up
to 2.3 A |
| Arms |
Up
to 1.6 A |
| Feedback |
Noncontact
Rotary Encoder (1000 line) |
|
Resolution |
2 mm/rev lead |
0.5 µm (20 µin) @ 4000 steps/rev Motor Resolution |
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4 mm/rev lead |
1.0 µm (40 µin) @ 4000 steps/rev Motor Resolution |
|
LN Linear Encoder |
0.001 µm - 0.2 µm (0.04 µin - 8.0 µin) |
N/A |
N/A |
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Maximum Travel Speed(1) |
2 mm/rev lead |
115 mm/s (4.5 in/s) |
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4 mm/rev lead |
230 mm/s (9.0 in/s) |
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Maximum Load(2) |
Horizontal |
45.0 kg (99.2 lb) |
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Vertical |
25.0 kg (55.1 lb) |
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Side |
25.0 kg (55.1 lb) |
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Accuracy |
Ball
Screw |
HALAR(3) |
±1.0 µm (±40 µin) |
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Standard |
+2,-4 µm
(+80,-160 µin) |
+2,-5 µm
(+80,-200 µin) |
+2,-8 µm
(+80,-320 µin) |
+2,-10 µm
(+80,-400 µin) |
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LN |
HALAR(3) |
±1.0 µm (±40 µin) |
N/A |
N/A |
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Standard |
±5.0 µm (±200 µin) |
N/A |
N/A |
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Repeatability (Bidirectional) |
Ball
Screw |
HALAR(3) |
±0.5 µm (±20 µin) |
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Standard |
±1.0 µm (±40 µin) |
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LN |
±0.5 µm (±20 µin) |
N/A |
N/A |
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Straightness and Flatness |
Differential |
HALSF |
1 µm/25 mm (40 µin/in) |
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Standard |
2 µm/25 mm (80 µin/in) |
Maximum
Deviation |
HALSF |
±1.0µm (±40 µin) |
±1.5 µm (±60 µin) |
±2.0 µm (±80 µin) |
±3.0 µm (±120 µin) |
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Standard |
±2.0 µm (±80 µin) |
±3.0 µm (±120 µin) |
±4.0 µm (±160 µin) |
±5.0 µm (±200 µin) |
| Pitch and
Yaw |
8 arc sec |
10 arc sec |
12 arc sec |
14 arc sec |
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Nominal Stage Weight |
Less Motor |
6.1 kg (13.4 lb) |
7.5 kg (16.5 lb) |
7.9 kg (17.4 lb) |
8.4 kg (18.5 lb) |
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With Motor |
7.2 kg (15.9 lb) |
8.6 kg (19.0 lb) |
9.0 kg (19.8 lb) |
9.5 kg (20.9 lb) |
| Construction |
Aluminum Body/Stage and Table; Clear Anodize Finish |
Notes:
1. Excessive duty cycle may impact accuracy.
2. Payload specifications are for single axis system and based on
ball screw and bearing life of 2500 km (100 million inches) of travel.
3. Available with Aerotech controllers.
4. Specifications are for single-axis systems, measured 50 mm above
the tabletop. Performance of multi-axis systems is payload and workpoint
dependent. Consult factory for multi-axis or non-standard applications.
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United
States [Change]
