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ATS2000 Series Linear Ball-Screw Stage

ATS20010

100 mm (4 in) travel stage with ground ball screw, recirculating bearings, and limits

ATS20015

150 mm (6 in) travel stage with ground ball screw, recirculating bearings, and limits

ATS20020

200 mm (8 in) travel stage with ground ball screw, recirculating bearings, and limits

ATS20025

250 mm (10 in) travel stage with ground ball screw, recirculating bearings, and limits

ATS20030

300 mm (12 in) travel stage with ground ball screw, recirculating bearings, and limits

Stage Construction Options

/VAC3

Vacuum preparation of stage to 10^-3 torr

/VAC6

Vacuum preparation of stage to 10^-6 torr

Mounting and Grid Pattern

-M

Metric dimension mounting pattern and holes

-U

English dimension mounting pattern and holes

Drive Screw

-02P

0.2 inch per rev drive-screw lead

-40P

4 mm per rev drive-screw lead

Motor

-BMS

Brushless servomotor with connectors and 1000-line encoder; requires cable (BMS60-A-D25-E1000H/)

-SM

Stepping motor with connector and home marker pulse (one per rev); requires cable (101SMB2-HM/)

-NM

No motor or encoder

Standard Linear Encoders

-LT10X5

Linear encoder for ATS20010, 1 micron, line driver output

-LT15X5

Linear encoder for ATS20015, 1 micron, line driver output

-LT20X5

Linear encoder for ATS20020, 1 micron, line driver output

-LT25X5

Linear encoder for ATS20025, 1 micron, line driver output

-LT30X5

Linear encoder for ATS20030, 1 micron, line driver output

-LT10AS

Linear encoder for ATS20010, amplified sine output, 1 Vpp (20 µm signal period); requires signal multiplier

-LT15AS

Linear encoder for ATS20015, amplified sine output, 1 Vpp (20 µm signal period); requires signal multiplier

-LT20AS

Linear encoder for ATS20020, amplified sine output, 1 Vpp (20 µm signal period); requires signal multiplier

-LT25AS

Linear encoder for ATS20025, amplified sine output, 1 Vpp (20 µm signal period); requires signal multiplier

-LT30AS

Linear encoder for ATS20030, amplified sine output, 1 Vpp (20 µm signal period); requires signal multiplier

-LTNONE

No linear encoder option

High-Accuracy Linear Encoders

-LN10AS

High-accuracy linear encoder for ATS20010, amplified sine output, 1 Vpp (4 µm signal period); requires signal multiplier

-LN15AS

High-accuracy linear encoder for ATS20015, amplified sine output, 1 Vpp (4 µm signal period); requires signal multiplier

-LN20AS

High-accuracy linear encoder for ATS20020, amplified sine output, 1 Vpp (4 µm signal period); requires signal multiplier

-LN25AS

High-accuracy linear encoder for ATS20025, amplified sine output, 1 Vpp (4 µm signal period); requires signal multiplier

-LN30AS

High-accuracy linear encoder for ATS20030, amplified sine output, 1 Vpp (4 µm signal period); requires signal multiplier

Note: Integral signal multipliers available with A3200 amplifier products.

Limits

-NC

Normally-closed end of travel limit switches (standard)

-NO

Normally-open end of travel limit switches

Options

-BRK

24 VDC spring-set motor brake for NEMA 23 motor

-FB

Foldback motor kit for BMS60 motor (0.25 in shaft)

-FB-BRK23

Foldback motor kit for use with NEMA 23 brake (brake between stage and foldback)

-P2

Air-purge pressure fittings

-FB/BMS100

Fold-back motor kit for BMS100 motor (0.375 in shaft)

Coupling

-NO COUPLING

No coupling

-STD COUPLING

0.25 in coupling

-LGR MTR COUPLING

0.375 in coupling

Accessories (to be ordered as separate line item)

ALIGNMENT-NPA

Non-precision XY assembly

ALIGNMENT-NPAZ

Non-precision XZ or YZ assembly

ALIGNMENT-PA10

XY assembly; 10 arc sec orthogonal

ALIGNMENT-PA10Z

XZ or YZ assembly with L-bracket; 10 arc second orthogonal

ALIGNMENT-PA5

XY assembly; 5 arc sec orthogonal

ALIGNMENT-PA5Z

XZ or YZ assembly with L-bracket; 5 arc second orthogonal

HDZ20

English right angle L-bracket to mount any ATS2000 series stage

HDZ20M

Metric right angle L-bracket to mount any ATS2000 series stage

HDZ20/VAC6

VAC6 prepared English right angle L-bracket to mount any ATS2000 series stage

HDZ20M/VAC6

VAC6 prepared metric right angle L-bracket to mount any ATS2000 series stage

HALAR

High-accuracy system – linear error correction for accuracy and repeatability

HALSF

High-accuracy system – improved straightness and flatness