| Total Travel |
100 mm |
150 mm |
200 mm |
250 mm |
300 mm |
| Drive System |
Super-Precision Ground Ball Screw/Brushless Servomotor (BMS60-A-D25-E1000H) |
| Bus Voltage |
Up
to 160 VDC |
| Continuous
Current |
Apk |
Up
to 2.3 A |
| Arms |
Up
to 1.6 A |
| Feedback |
Noncontact
Rotary Encoder (1000 line) |
|
Resolution |
4 mm/rev Lead |
1.0 µm (40 µin) @ 4000 steps/rev Motor Resolution |
|
0.2 in/rev Lead |
1.25 µm (50 µin) @ 4000 steps/rev Motor Resolution |
|
LN Linear Encoder |
0.001 µm - 0.2 µm (0.04 µin - 8 µin) |
|
LT Linear Encoder |
0.005 µm - 1.0 µm (0.2 µin - 40 µin) |
Maximum Travel
Speed(1) |
4 mm/rev Lead |
220 mm/s (8.7 in/s) |
|
0.2 in/rev Lead |
280 mm/s (11 in/s) |
|
Maximum Load(2) |
Horizontal |
80.0 kg (176.4 lb) |
|
Vertical |
40.0 kg (88.2 lb) |
|
Side |
40.0 kg (88.2 lb) |
|
Accuracy |
Ball Screw |
HALAR(3) |
±1.0 µm ( ±40 µin) |
|
Standard |
+2.0,-4.0 µm
(+80, -160 µin) |
+2.0,-5.0 µm
(+80, -200 µin) |
+2.0,-8.0 µm
(+80,-320 µin) |
+2.0,-10.0 µm
(+80,-400 µin) |
+2.0,-12.0 µm
(+80,-480 µin) |
|
LN |
HALAR(3) |
±1.0 µm ( ±40 µin) |
|
Standard |
±5.0 µm ( ±200 µin) |
|
LT |
HALAR(3) |
±1.0 µm (±40 µin) |
|
Standard |
±5.0 µm ( ±200 µin) |
Repeatability
(Bidirectional) |
Ball Screw |
HALAR(3) |
±0.5 µm (±20 µin) |
|
Standard |
±1.0 µm (±40 µin) |
|
LN |
±0.5 µm (±20 µin) |
|
LT |
±0.5 µm (±20 µin) |
|
Straightness and Flatness |
Differential |
HALSF |
1.0 µm/25 mm (40 µin/in) |
|
Standard |
1.0 µm/25 mm (40 µin/in) |
Maximum
Deviation |
HALSF |
±1.0 µm
(±40 µin) |
±1.5 µm
(±60 µin) |
±2.0 µm
(±80 µin) |
±3.0 µm
(±120 µin) |
±3.0 µm
(±120 µin) |
|
Standard |
±2.0 µm
(±80 µin) |
±3.0 µm
(±120 µin) |
±4.0 µm
(±160 µin) |
±5.0 µm
(±200 µin) |
±5.0 µm
(±200 µin) |
| Pitch and
Yaw |
6 arc sec |
8 arc sec |
10 arc sec |
12 arc sec |
14 arc sec |
Nominal Stage
Weight |
Less Motor |
9.5 kg (20.9 lb) |
11.0 kg (24.3 lb) |
12.0 kg (26.5 lb) |
13.5 kg (29.8 lb) |
15.0 kg (33.1 lb) |
|
With Motor |
10.6 kg (23.4 lb) |
12.1 kg (26.7 lb) |
13.1 kg (28.9 lb) |
14.6 kg (32.2 lb) |
16.1 kg (35.5 lb) |
| Construction |
Aluminum Body/Stage; Hard Coated Table (62 Rockwell Hardness);
Textured Epoxy (Polane-T) Pebble Grey Paint |
United
States [Change]
