The demand for a high accuracy, robust, open-frame
stage is met with the ATS3600. This dual-axis, large aperture,
open-frame stage addresses the unique needs of scanning microscopy,
wafer and printed circuit board inspection, and automated assembly.
Design and Construction
Unlike other designs that are assembled from several discrete
pieces, the ATS3600 is a three-piece design. This allows critical
components such as orthogonality, straightness, and flatness to
be controlled during the initial machining, resulting in a stage
with exceptional geometrical tolerances and inherent orthogonality.
The ATS3600 utilizes high-precision linear motion guide (LMG)
bearings, with a total of four trucks per axis. These make the
ATS3600 ideal for fast, repetitive operations. The LMG bearings
also exhibit exceptional stiffness, high load capacity, and extremely
low friction.
The high stiffness inherent in this stage allows it to be side-driven,
yet still retain excellent performance characteristics. The ATS3600
represents a major upgrade in performance over typical side-drive
stages.
Motors and Drives
The ATS3600 includes two high-performance NEMA 23 BMS series brushless,
slotless motors. This motor has all of the advantages of a brushless
motor – high acceleration, no brushes to wear, and lower
heating – yet has zero cogging for the ultimate in smooth
motion.
Optional Linear Encoder Feedback
A high-resolution, noncontact linear encoder is available as an
option. This noncontact encoder offers exceptional repeatability
and stability over a range of operating conditions. Both digital
and analog output versions are available. The digital version
has a resolution of 1µm, while the analog version, when
coupled with an Aerotech multiplier box, can reach resolutions
of 20 nm.
Alternate Configurations
All stage travels offer both single- and dual-axis designs, as
well as the option for a solid tabletop. For the ultimate in performance,
a linear motor version is available – please refer to ALS3600.
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