|
|
|
|
|
| |
|
| Ordering Example |
|
ATS362 |
10 |
|
-50B |
-BMS |
-NC |
|
|
|
Series |
Travel (mm) |
Stage Construction Options |
Drive Screw |
Motor |
Limits |
Standard Linear Encoder |
Coupling |
|
|
10
20
30
40 |
/VAC3
/VAC6
|
-50B
-50P |
-BMS
-DC
-SM
-NM |
-NC
-NO
-9DU
-FLY |
-2LTnnX5
-2LTnnAS |
-NO COUPLING
-STD COUPLING
-LGR MTR COUPLING |
ATS3620 Series Two-Axis,
Open Frame, Linear Ball-Screw Stage |
| ATS36210 |
100 mm x 100 mm (4
in x 4 in) travel stage with ball screw and limits |
| ATS36220 |
200 mm x 200 mm (8
in x 8 in) travel stage with ball screw and limits |
| ATS36230 |
300 mm x 300 mm (12
in x 12 in) travel stage with ball screw and limits |
| ATS36240 |
400 mm x 400 mm (16
in x 16 in) travel stage with ball screw and limits |
|
Base Model Options |
| /VAC3 |
Vacuum preparation
of stage to 10-3 torr |
| /VAC6 |
Vacuum preparation
of stage to 10-6 torr |
|
Drive Screw |
| -50B |
5 mm per revolution
precision ball screw |
| -50P |
5 mm per revolution
super-precision ground ball screw |
|
Motor |
| -BMS |
Brushless servomotor
with connectors and 1250-line encoder; requires cable (BMS60-A-D25-E1250H/) |
| -DC |
DC servomotor with
connector and 1250-line encoder; requires cable (1050LT-MSOF-E1250LD/) |
| -SM |
Stepping motor with
connector and home marker pulse (one per rev); requires cable
(101SMB2-HM/) |
| -NM |
No motor or encoder |
|
Limits |
| -NC |
Normally-closed end
of travel limit switches (standard) |
| -NO |
Normally-open end
of travel limit switches |
-9DU |
With 9-pin limit connector |
-FLY |
With flying leads |
|
Standard Linear Encoder |
| -2LT10X5 |
Linear encoder set
for model ATS36210; 1.0 micron line driver output |
| -2LT20X5 |
Linear encoder set
for model ATS36220; 1.0 micron line driver output |
| -2LT30X5 |
Linear encoder set
for model ATS36230; 1.0 micron line driver output |
| -2LT40X5 |
Linear encoder set
for model ATS36240; 1.0 micron line driver output |
| -2LT10AS |
Linear encoder set
for model ATS36210; amplified sine output 1 Vpp (20 µm signal
period); requires signal multiplier |
| -2LT20AS |
Linear encoder set
for model ATS36220; amplified sine output 1 Vpp (20 µm signal
period); requires signal multiplier |
| -2LT30AS |
Linear encoder set
for model ATS36230; amplified sine output 1 Vpp (20 µm signal
period); requires signal multiplier |
| -2LT40AS |
Linear encoder set
for model ATS36240; amplified sine output 1 Vpp (20 µm signal
period); requires signal multiplier |
Note: Internal signal
multipliers available with A3200 amplifier products. |
|
Coupling |
| -NO COUPLING |
No coupling |
| -STD COUPLING |
0.25 in coupling |
-LGR MTR COUPLING |
0.375 in coupling |
|
Accessories (to be ordered
as separate line item) |
| HALAR |
High-accuracy system
– linear error correction for accuracy and repeatability |
|
|
|