| Total Travel |
100 mm |
200 mm |
300 mm |
400 mm |
| Drive System |
Super-Precision Ground Ball Screw (P) or Precision Ball Screw
(B);
Brushless Servomotor (BMS60-A-D25-E1250H) |
| Bus Voltage |
Up
to 160 VDC |
| Continuous
Current |
Apk |
Up
to 2.3 A |
| Arms |
Up
to 1.6 A |
Feedback |
Noncontact
Rotary Encoder (1250 line) |
|
Resolution |
5 mm/rev Lead |
1.0 µm (40 µin) @ 5000 steps/rev Motor Resolution |
|
LT Linear Encoder |
0.005 µm - 1.0 µm (0.2 µin - 40 µin) |
| Maximum Travel
Speed(1) |
200 mm/s (8 in/s) |
| Maximum Load(2) |
90.0 kg (198.4 lb) |
|
Accuracy |
Super-Precision
Ball
Screw |
±1.0 µm/25 mm (±40 µin/in) |
|
Precision Ball Screw |
±2.0 µm/25 mm (±80 µin/in) |
|
LT |
HALAR(3) |
±2.0 µm (±80.0 µin) |
|
Standard |
±4.0 µm (±160.0 µin) |
±8.0 µm (±320.0 µin) |
±12.0 µm (±480.0 µin) |
±16.0 µm (±960.0 µin) |
Repeatability
(Bidirectional) |
Super-Precision
Ball Screw |
±1.5 µm (±60 µin) |
|
Precision Ball Screw |
±2.0 µm (±80 µin) |
|
LT |
±1.0 µm (±40 µin) |
|
Straightness and Flatness |
Differential |
1.0 µm/25mm (40 µin/in) |
|
Maximum Deviation |
±2.0 µm (±80 µin) |
±4.0 µm (±160 µin) |
±6.0 µm (±240 µin) |
±8.0 µm (±320 µin) |
| Pitch and
Yaw |
10 arc sec |
15 arc sec |
18 arc sec |
20 arc sec |
|
Nominal Stage Weight |
Less Motor |
22.8 kg (50.3
lb) |
34.2 kg (75.4
lb) |
44.4 kg (97.9
lb) |
60.3 kg (133.0
lb) |
| With Motor |
26.4 kg (58.2
lb) |
37.8 kg (83.3
lb) |
48.0 kg (105.8
lb) |
63.9 kg (140.9
lb) |
| Construction |
Aluminum Body; Black Anodize Finish |