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ATS5000 Series Linear Ball Screw Stage

ATS50030WB

300 mm (12 in) travel stage with ground ball screw and limits

ATS50045WB

450 mm (18 in) travel stage with ground ball screw and limits

ATS50060WB

600 mm (24 in) travel stage with ground ball screw and limits

ATS50075WB

750 mm (30 in) travel stage with ground ball screw and limits

ATS50090WB

900 mm (36 in) travel stage with ground ball screw and limits

ATS50100WB

1000 mm (40 in) travel stage with ground ball screw and limits

Stage Construction Options

/VAC3

Vacuum preparation of stage to 10^-3 torr.

/VAC6

Vacuum preparation of stage to 10^-6 torr.

/STEEL

All steel construction

Mounting and Grid Pattern

-M

Metric dimension mounting pattern and holes

-U

English dimension mounting pattern and holes

Drive Screw

-02P

0.2 inch per rev drive-screw lead

-40P

4 mm per rev drive-screw lead

Motor

-BM

Brushless servomotor with connectors and 1000-line encoder; requires cable (BM250-MS-E1000H/)

-NM

No motor or encoder

-BMS

Brushless, slotless servomotor with connectors and 1000-line encoder; requires cable (BMS280-AH-MS-E1000H)

Limits

-NC

Normally-closed end of travel limit switches (standard)

-NO

Normally-open end of travel limit switches

-9DU

With 9-pin limit connector

-FLY

With flying leads

Standard Linear Encoders

-LT30AS

Linear encoder for ATS50030WB; amplified sine output 1 Vpp (20 µm signal period); requires signal multiplier

-LT45AS

Linear encoder for ATS50045WB; amplified sine output 1 Vpp (20 µm signal period); requires signal multiplier

-LT60AS

Linear encoder for ATS50060WB; amplified sine output 1 Vpp (20 µm signal period); requires signal multiplier

-LT75AS

Linear encoder for ATS50075WB; amplified sine output 1 Vpp (20 µm signal period); requires signal multiplier

-LT90AS

Linear encoder for ATS50090WB; amplified sine output 1 Vpp (20 µm signal period); requires signal multiplier

-LT100AS

Linear encoder for ATS50100WB; amplified sine output 1 Vpp (20 µm signal period); requires signal multiplier

-LT30X5

Linear encoder for ATS50030WB; 1.0 micron line driver output

-LT45X5

Linear encoder for ATS50045WB; 1.0 micron line driver output

-LT60X5

Linear encoder for ATS50060WB; 1.0 micron line driver output

-LT75X5

Linear encoder for ATS50075WB; 1.0 micron line driver output

-LT90X5

Linear encoder for ATS50090WB; 1.0 micron line driver output

-LT100X5

Linear encoder for ATS50100WB; 1.0 micron line driver output

High-Accuracy Linear Encoders

-LN30AS

High-accuracy linear encoder for ATS50030WB; amplified sine output 1 Vpp (4 µm signal period); requires signal multiplier

-LN45AS

High-accuracy linear encoder for ATS50045WB; amplified sine output 1 Vpp (4 µm signal period); requires signal multiplier

-LN60AS

High-accuracy linear encoder for ATS50060WB; amplified sine output 1 Vpp (4 µm signal period); requires signal multiplier

-LN75AS

High-accuracy linear encoder for ATS50075WB; amplified sine output 1 Vpp (4 µm signal period); requires signal multiplier

-LN90AS

High-accuracy linear encoder for ATS50090WB; amplified sine output 1 Vpp (4 µm signal period); requires signal multiplier

-LN100AS

High-accuracy linear encoder for ATS50100WB; amplified sine output 1 Vpp (4 µm signal period); requires signal multiplier

Note: Internal signal multiplier available with A3200 amplifier products.

Options

-BRK34

24 VDC spring-set motor brake for NEMA 34 motor

-P5

Air-purge pressure fittings

-FB

Foldback motor kit

-FB-BRK

Foldback motor kit for use with NEMA 34 brake (brake between stage and foldback)

Accessories (to be ordered as separate line item)

HALAR

High-accuracy system – linear error correction for accuracy and repeatability

HALSF

High-accuracy system – improved straightness and flatness

ALIGNMENT-NPA

Non-precision XY assembly

ALIGNMENT-NPAZ

Non-precision XZ or YZ assembly

ALIGNMENT-PA10

XY assembly; 10 arc sec orthogonal

ALIGNMENT-PA10Z

XZ or YZ assembly with L-bracket; 10 arc second orthogonal

ALIGNMENT-PA5

XY assembly; 5 arc sec orthogonal

ALIGNMENT-PA5Z

XZ or YZ assembly with L-bracket; 5 arc second orthogonal