Notes:
1. Excessive duty cycle may impact stage accuracy.
2. Payload specifications are for single-axis system and based on
ball screw and bearing life of 2500 km (100 million inches) of travel.
3. Available with Aerotech controllers.
4. Specifications are for single-axis systems, measured 50 mm above
the tabletop. Performance of multi-axis systems is payload and workpoint
dependent. Consult factory for multi-axis or non-standard applications.