|
Total Travel(1) |
500 mm |
750 mm |
1000 mm |
1250 mm |
1500 mm |
|
Drive System |
Superprecision Ground Ball Screw (P) or Precision Rolled Ball
Screw (B);
Brushless Servomotor (BM250-MS-E1250H) |
| Bus
Voltage |
Up
to 320 VDC |
| Continuous
Current |
Apk |
Up
to 10.5 A |
| Arms |
Up
to 7.4 A |
| Feedback |
Noncontact
Rotary Encoder (1250 line) |
|
Resolution |
5 mm/rev Lead |
1.0 µm (40 µin) @ 5000 steps/rev Motor Resolution |
|
25 mm/rev Lead(2) |
5.0 µm (200 µin) @ 5000 steps/rev Motor Resolution |
|
Maximum Travel Speed(3) |
5 mm/rev Lead |
300 mm/s
(12 in/s) |
280 mm/s
(11 in/s) |
170 mm/s
(7 in/s) |
110 mm/s
(4 in/s) |
80 mm/s
(3 in/s) |
|
25 mm/rev Lead |
1500 mm/s
(60 in/s) |
1400 mm/s
(56 in/s) |
860 mm/s
(34 in/s) |
580 mm/s
(23 in/s) |
415 mm/s
(16 in/s) |
|
Maximum Load(4) |
Horizontal |
90.0 kg (198.4 lb) |
|
Vertical |
70.0 kg (154.3 lb) |
|
Side |
45.0 kg (99.7 lb) |
|
Accuracy |
Super-Precision Ball Screw |
±1.0 µm/25 mm (±40 µin/in) |
|
Precision Ball Screw |
±2.0 µm/25 mm (±80 µin/in) |
Repeatability
(Bidirectional) |
Super-Precision Ball Screw |
±1.0 µm (±40 µin) |
|
Precision Ball Screw |
±2.0 µm (±80 µin) |
|
Straightness and Flatness |
±2.0 µm/25 mm (±80 µin/in) |
| Nominal
Stage Weight |
28.2
kg (62.0 lb) |
32.1
kg (70.6 lb) |
38.9
kg (85.6 lb) |
45.5
kg (100.0 lb) |
52.3
kg (115.0 lb) |
|
Construction |
Aluminum Body/Black Anodize Finish |