| Total Travel |
100 mm |
150 mm |
200 mm |
250 mm |
| Drive System |
Ball Screw/Brushless Servomotor (BM75-D25-E2500H) |
| Bus Voltage |
Up to 160 VDC |
| Continuous Current |
Apk |
Up to 2.3 A |
| Arms |
Up to 1.6 A |
| Feedback |
Noncontact Rotary Encoder (2500 line) |
| Resolution |
20 mm/rev lead |
2 µm with 2500 line Quadrature Encoder |
| Maximum Travel Speed(1) |
20 mm/rev lead |
1200 mm/s (47 in/s) |
| Maximum Load(2) |
Horizontal |
40.0 kg (88 lb) |
| Vertical |
N/A |
| Side |
40 kg (88 lb) |
| Accuracy |
20 mm/rev lead |
±8 µm |
±10 µm |
±10 µm |
±12 µm |
| Bidirectional Repeatability |
20 mm/rev lead |
±2 µm |
| Straightness and Flatness |
5 µm |
6 µm |
10 µm |
10 µm |
| Nominal Stage Weight |
Less Motor |
4.1 kg (9.0 lb) |
4.6 kg (10.1 lb) |
5.0 kg (11.0 lb) |
5.5 kg (12.1 lb) |
| With Motor |
5.2 kg (11.4 lb) |
5.7 kg (12.5 lb) |
6.1 kg (13.4 lb) |
6.6 kg (14.5 lb) |
| Construction |
Black Anodized Aluminum Body with Hardcoated Tabletop |
Notes:
1. Excessive duty cycle may impact stage accuracy.
2. Payload specifications are for single-axis system and
based on ball screw and bearing life of 2500 km (100 million inches) of travel.
3. Specifications are for single-axis systems, measured 50
mm above the tabletop. Performance of multi-axis systems is payload and
workpoint dependent. Consult factory for multi-axis or non-standard
applications.
| Total
Travel |
300
mm |
400
mm |
500
mm |
| Drive
System |
Ball
Screw/Brushless Servomotor (BM75-D25-E2500H) |
| Bus
Voltage |
Up
to 160 VDC |
| Continuous
Current |
Apk |
Up
to 2.3 A |
| Arms |
Up
to 1.6 A |
| Feedback |
Noncontact
Rotary Encoder (2500 line) |
| Resolution |
20
mm/rev lead |
2
µm with 2500 line Quadrature Encoder |
| Maximum
Travel Speed(1) |
20
mm/rev lead |
1200
mm/s (47 in/s) |
1000
mm/s (39 in/s) |
| Maximum
Load(2) |
Horizontal |
40.0
kg (88 lb) |
| Vertical |
N/A |
| Side |
40
kg (88 lb) |
| Accuracy |
20
mm/rev lead |
±12
µm |
±28
µm |
±32
µm |
| Bidirectional
Repeatability |
20
mm/rev lead |
±2
µm |
| Straightness
and Flatness |
12
µm |
16
µm |
18
µm |
| Nominal
Stage Weight |
Less
Motor |
5.9
kg (13.0 lb) |
6.8
kg (15.0 lb) |
7.6
kg (16.7 lb) |
| With
Motor |
7.0
kg (15.4 lb) |
7.9
kg (17.4 lb) |
8.7
kg (19.1 lb) |
| Construction |
Black
Anodized Aluminum Body with Hardcoated Tabletop |
Notes:
1. Excessive duty cycle may impact stage accuracy.
2. Payload specifications are for single-axis system and
based on ball screw and bearing life of 2500 km (100 million inches) of travel.
3. Specifications are for single-axis systems, measured 50
mm above the tabletop. Performance of multi-axis systems is payload and
workpoint dependent. Consult factory for multi-axis or non-standard
applications. |
United
States [Change]
