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| Total Travel |
50 mm |
100 mm |
150 mm |
200 mm |
250 mm |
| Drive System |
Ball Screw/Brushless Servomotor (BMS60-A-D25-E2500H) |
| Bus Voltage |
Up to 160 VDC |
|
Continuous Current |
Apk |
Up to 2.3 A |
|
Arms |
Up to 1.6 A |
| Feedback |
|
Noncontact Rotary Encoder (2500 line) |
| Resolution
(5 mm/rev lead) |
0.5
µm with 2500 line Quadrature Encoder |
| Maximum
Travel Speed(1) |
300
mm/s (12 in/s) |
Maximum
Load(2) |
Horizontal |
40.0
kg (88 lb) |
| Vertical |
18.2
kg (40 lb) |
| Side |
40
kg (88 lb) |
| Accuracy
|
±6 µm |
±6 µm |
±8 µm |
±8 µm |
±10 µm |
| Bidirectional
Repeatability |
±1 µm |
|
Nominal Stage Weight |
Less Motor |
3.7 kg (8.1 lb) |
4.1 kg (9.0 lb) |
4.6 kg (10.1 lb) |
5.0 kg (11.0 lb) |
5.5 kg (12.1 lb) |
|
With Motor |
4.8 kg (10.6 lb) |
5.2 kg (11.4 lb) |
5.7 kg (12.5 lb) |
6.1 kg (13.4 lb) |
6.6 kg (14.5 lb) |
| Construction |
Black Anodized Aluminum Body with Hardcoated Tabletop |
Notes:
1. Excessive duty cycle may impact stage accuracy.
2. Payload specifications are for single-axis system and based on
ball screw and bearing life of 2500 km (100 million inches) of travel.
3. Specifications are for single-axis systems, measured 50 mm above
the tabletop. Performance of multi-axis systems is payload and workpoint
dependent. Consult factory for multi-axis or non-standard applications.
| Total Travel |
300 mm |
400 mm |
500 mm |
600 mm |
| Drive System |
Ball Screw/Brushless Servomotor (BMS60-A-D25-E2500H) |
| Bus Voltage |
Up to 160 VDC |
|
Continuous Current |
Apk |
Up to 2.3 A |
|
Arms |
Up to 1.6 A |
| Feedback |
|
Noncontact Rotary Encoder (2500 line) |
| Resolution
(5 mm/rev lead) |
0.5
µm with 2500 line Quadrature Encoder |
| Maximum
Travel Speed(1) |
300
mm/s (12 in/s) |
250
mm/s (10 in/s) |
Maximum
Load(2) |
Horizontal |
40.0
kg (88 lb) |
| Vertical |
18.2
kg (40 lb) |
| Side |
40
kg (88 lb) |
| Accuracy
|
±10 µm |
±12 µm |
±14 µm |
±16 µm |
| Bidirectional
Repeatability |
±1 µm |
|
Nominal Stage Weight |
Less Motor |
5.9
kg (13.0 lb) |
6.8
kg (15.0 lb) |
7.6
kg (16.7 lb) |
8.5
kg (18.7 lb) |
|
With Motor |
7.0
kg (15.4 lb) |
7.9
kg (17.4 lb) |
8.7
kg (19.1 lb) |
9.6
kg (21.1 lb) |
| Construction |
Black Anodized Aluminum Body with Hardcoated Tabletop |
Notes:
1. Excessive duty cycle may impact stage accuracy.
2. Payload specifications are for single-axis system and based on
ball screw and bearing life of 2500 km (100 million inches) of travel.
3. Specifications are for single-axis systems, measured 50 mm above
the tabletop. Performance of multi-axis systems is payload and workpoint
dependent. Consult factory for multi-axis or non-standard applications.
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United
States [Change]
