| Total Travel |
100 mm |
150 mm |
200 mm |
250 mm |
| Drive System |
Precision Ball Screw/Brushless Servomotor
(BM130-D25-E2500H) |
| Bus Voltage |
Up to 160 VDC |
| Continuous Current |
Apk |
Up to 2.1 A |
| Arms |
Up to 1.5 A |
| Feedback |
Noncontact Rotary Encoder (2500 line) |
| Resolution |
20 mm/rev lead |
2 µm with 2500 line Quadrature Encoder |
| Maximum Travel Speed(1) |
20 mm/rev lead |
1200 mm/s (47 in/s) |
Maximum
Load(2) |
Horizontal |
45 kg |
| Vertical |
N/A |
| Side |
45 kg |
| Accuracy |
20 mm/rev lead |
±8 µm |
±10 µm |
±10 µm |
±12 µm |
| Bidirectional Repeatability |
20 mm/rev lead |
±2 µm |
| Straightness and Flatness |
5 µm |
6 µm |
10 µm |
10 µm |
| Nominal Stage Weight |
With Motor |
7.9 kg (17.4 lb) |
8.5 kg (18.7 lb) |
9.0 kg (19.8 lb) |
9.6 kg (21.1 lb) |
| Less Motor |
6.4 kg (14.1 lb) |
7.0 kg (15.4 lb) |
7.5 kg (16.5 lb) |
8.1 kg (17.8 lb) |
| Construction |
Black Anodized Aluminum Body with Hardcoated Tabletop |
Notes:
1. Excessive duty cycle may impact stage accuracy.
2. Payload specifications are for single-axis system and
based on ball screw and bearing life of 2500 km (100 million inches) of travel.
3. Specifications are for single-axis systems, measured 50
mm above the tabletop. Performance of multi-axis systems is payload and workpoint
dependent. Consult factory for multi-axis or non-standard applications.
| Total Travel |
300 mm |
400 mm |
500 mm |
| Drive System |
Precision Ball Screw/Brushless Servomotor
(BM130-D25-E2500H) |
| Bus Voltage |
Up to 160 VDC |
| Continuous Current |
Apk |
Up to 2.1 A |
| Arms |
Up to 1.5 A |
| Feedback |
|
Noncontact Rotary Encoder (2500 line) |
| Resolution |
20 mm/rev lead |
2 µm with 2500 line Quadrature Encoder |
| Maximum Travel Speed(1) |
20 mm/rev lead |
1200 mm/s (47 in/s) |
1000 mm/s (39 in/s) |
Maximum
Load(2) |
Horizontal |
45 kg |
| Vertical |
N/A |
| Side |
45 kg |
| Accuracy |
20 mm/rev lead |
±12 µm |
±28 µm |
±32 µm |
| Bidirectional Repeatability |
20 mm/rev lead |
±2 µm |
| Straightness and Flatness |
12 µm |
16 µm |
18 µm |
| Nominal Stage Weight |
With Motor |
10.2 kg (22.5 lb) |
11.4 kg (25.0 lb) |
12.6 kg (27.7 lb) |
| Less Motor |
8.7 kg (19.1 lb) |
9.9 kg (21.8 lb) |
11.1 kg (24.4 lb) |
| Construction |
Black Anodized Aluminum with Hardcoated Tabletop |
Notes:
1. Excessive duty cycle may impact stage accuracy.
2. Payload specifications are for single-axis system and
based on ball screw and bearing life of 2500 km (100 million inches) of travel.
3. Specifications are for single-axis systems, measured 50
mm above the tabletop. Performance of multi-axis systems is payload and
workpoint dependent. Consult factory for multi-axis or non-standard
applications.
|
United
States [Change]
