| Travel |
100 mm |
150 mm |
200 mm |
250 mm |
| Accuracy(1) |
Standard |
±4.0 µm |
±6.0 µm |
±8.0 µm |
±10.0 µm |
| HALAR |
±1.5 µm |
±1.5 µm |
±1.5 µm |
±2.0 µm |
| Resolution |
250 nm |
250 nm |
250 nm |
250 nm |
| Bi-Directional Repeatability(1) |
±0.75 µm |
±0.75 µm |
±0.75 µm |
±0.75 µm |
| Straightness(1) |
±2.5 µm |
±3.0 µm |
±4.5 µm |
±5.0 µm |
| Flatness(1) |
±2.5 µm |
±3.0 µm |
±4.5 µm |
±5.0 µm |
| Pitch |
6 arc sec |
7 arc sec |
9 arc sec |
10 arc sec |
| Roll |
6 arc sec |
7 arc sec |
9 arc sec |
10 arc sec |
| Yaw |
8 arc sec |
8 arc sec |
12 arc sec |
12 arc sec |
| Maximum Speed |
2 m/s |
| Maximum Acceleration |
3 g |
| Maximum Force (Continuous) |
68.2 N |
| Load Capacity(2) |
Horizontal |
45 kg |
| Side |
45 kg |
| Moving Mass |
2.5 kg |
| Stage Mass |
10 kg |
11 kg |
12 kg |
13 kg |
| Material |
Aluminum |
| MTBF (Mean Time Between Failure) |
20,000 Hours |
Notes:
1. Certified with -PLOTS option.
2. Axis orientation for on-axis loading is listed. See
curves for offset loading behavior.
3. Specifications are for single-axis systems measured 25 mm
above the table top. Performance of multi-axis systems is payload and workpoint
dependent. Consult factory for multi-axis or non-standard applications.
| Travel |
300 mm |
400 mm |
500 mm |
600 mm |
| Accuracy(1) |
Standard |
±11.5 µm |
±14.0 µm |
±16.0 µm |
±17.5 µm |
| HALAR |
±2.0 µm |
±2.0 µm |
±2.5 µm |
±2.5 µm |
| Resolution |
250 nm |
250 nm |
250 nm |
250 nm |
| Bi-Directional Repeatability(1) |
±0.75 µm |
±0.75 µm |
±0.75 µm |
±0.75 µm |
| Straightness(1) |
±6.0 µm |
±8.0 µm |
±9.0 µm |
±10.0 µm |
| Flatness(1) |
±6.0 µm |
±8.0 µm |
±9.0 µm |
±10.0 µm |
| Pitch |
12 arc sec |
16 arc sec |
19 arc sec |
22 arc sec |
| Roll |
12 arc sec |
16 arc sec |
19 arc sec |
22 arc sec |
| Yaw |
16 arc sec |
20 arc sec |
24 arc sec |
28 arc sec |
| Maximum Speed |
2 m/s |
| Maximum Acceleration |
3 g |
| Maximum Force (Continuous) |
68.2 N |
| Load Capacity(2) |
Horizontal |
45 kg |
| Side |
45 kg |
| Moving Mass |
2.5 kg |
| Stage Mass |
14 kg |
16 kg |
18 kg |
20 kg |
| Material |
Aluminum |
| MTBF (Mean Time Between Failure) |
20,000 Hours |
Notes:
1. Certified with -PLOTS option.
2. Axis orientation for on-axis loading is listed. See
curves for offset loading behavior.
3. Specifications are for single-axis systems measured 25 mm
above the table top. Performance of multi-axis systems is payload and workpoint
dependent. Consult factory for multi-axis or non-standard applications.
| Travel |
800 mm |
1000 mm |
| Accuracy(1) |
Standard |
±19.0 µm |
±20.0 µm |
| HALAR |
±2.5 µm |
±2.5 µm |
| Resolution |
250 nm |
250 nm |
| Bi-Directional Repeatability(1) |
±0.75 µm |
±0.75 µm |
| Straightness(1) |
±12.0 µm |
±14.0 µm |
| Flatness(1) |
±12.0 µm |
±14.0 µm |
| Pitch |
27 arc sec |
30 arc sec |
| Roll |
27 arc sec |
30 arc sec |
| Yaw |
34 arc sec |
38 arc sec |
| Maximum Speed |
2 m/s |
| Maximum Acceleration |
3 g |
| Maximum Force (Continuous) |
68.2 N |
| Load Capacity(2) |
Horizontal |
45 kg |
| Side |
45 kg |
| Moving Mass |
2.5 kg |
| Stage Mass |
24 kg |
28 kg |
| Material |
Aluminum |
| MTBF (Mean Time Between Failure) |
20,000 Hours |
Notes:
1. Certified with -PLOTS option.
2. Axis orientation for on-axis loading is listed. See
curves for offset loading behavior.
3. Specifications are for single-axis systems measured 25 mm
above the table top. Performance of multi-axis systems is payload and workpoint
dependent. Consult factory for multi-axis or non-standard applications.
Electrical Specifications |
| Drive System |
Brushless Linear Servomotor |
| Feedback |
Noncontact Linear Encoder |
| Maximum Bus Voltage |
±320 VDC |
| Limit Switches |
5 V, Normally Closed |
| Home Switch |
Near Center |
|
United
States [Change]
