|
|
|
|
|
|
| |
|
| Total Travel |
50 mm |
100 mm |
150 mm |
200 mm |
250 mm |
| Drive System |
Precision Ball Screw/Brushless Servomotor (BMS100-A-D25-E2500H) |
| Bus Voltage
|
Up to 160 VDC |
|
Continuous Current |
Apk |
Up to 2.1 A |
|
Arms |
Up to 1.5 A |
| Feedback |
Noncontact Rotary Encoder (2500 line) |
| Resolution |
5 mm/rev lead |
0.5
µm with 2500 line Quadrature Encoder |
| Maximum Travel
Speed(1) |
300
mm/s |
| Maximum Load(2) |
Horizontal |
45
kg |
| Vertical |
25
kg |
| Side |
45
kg |
| Accuracy
|
±6 µm |
±6 µm |
±8 µm |
±8 µm |
±8 µm |
| Bidirectional
Repeatability |
±1 µm |
| Straightness
and Flatness |
3 µm |
5 µm |
6 µm |
10 µm |
10 µm |
|
Nominal Stage Weight |
With Motor |
7.3 kg (16.0 lb) |
7.9 kg (17.4 lb) |
8.5 kg (18.7 lb) |
9.0 kg (19.8 lb) |
9.6 kg (21.1 lb) |
|
Less Motor |
5.8 kg (12.8 lb) |
6.4 kg (14.1 lb) |
7.0 kg (15.4 lb) |
7.5 kg (16.5 lb) |
8.1 kg (17.8 lb) |
| Construction |
Black
Anodized Aluminum Body with Hardcoated Tabletop |
Notes:
1. Excessive duty cycle may impact stage accuracy.
2. Payload specifications are for single-axis system and based on
ball screw and bearing life of 2500 km (100 million inches) of travel.
3. Specifications are for single-axis systems, measured 50 mm above
the tabletop. Performance of multi-axis systems is payload and workpoint
dependent. Consult factory for multi-axis or non-standard applications.
| Total Travel
|
300 mm |
400 mm |
500 mm |
600 mm |
| Drive System
|
Precision Ball Screw/Brushless Servomotor (BMS100-A-D25-E2500H) |
| Bus Voltage
|
Up to 160 VDC |
|
Continuous Current |
Apk |
Up to 2.1 A |
|
Arms |
Up to 1.5 A |
| Feedback |
Noncontact Rotary Encoder (2500 line) |
| Resolution |
(5 mm/rev lead) |
0.5
µm with 2500 line Quadrature Encoder |
| Maximum Travel
Speed(1) |
300
mm/s |
|
Maximum Load(2) |
Horizontal |
45 kg |
|
Vertical |
25 kg |
|
Side |
45 kg |
| Accuracy |
±10 µm |
±12 µm |
±14 µm |
±16 µm |
| Bidirectional
Repeatability |
±1
µm |
| Straightness
and Flatness |
12 µm |
16 µm |
18 µm |
20 µm |
|
Nominal Stage Weight |
With Motor |
10.2 kg (22.5 lb) |
11.4 kg (25.0 lb) |
12.6 kg (27.7 lb) |
14.3 kg (31.5 lb) |
|
Less Motor |
8.7 kg (19.1 lb) |
9.9 kg (21.8 lb) |
11.1 kg (24.4 lb) |
12.8 kg (28.2 lb) |
| Construction |
Black
Anodized Aluminum with Hardcoated Tabletop |
Notes:
1. Excessive duty cycle may impact stage accuracy.
2. Payload specifications are for single-axis system and based on
ball screw and bearing life of 2500 km (100 million inches) of travel.
3. Specifications are for single-axis systems, measured 50 mm above
the tabletop. Performance of multi-axis systems is payload and workpoint
dependent. Consult factory for multi-axis or non-standard applications.
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United
States [Change]
