| Total
Travel |
100
mm |
150
mm |
200
mm |
250
mm |
300
mm |
| Drive
System |
Precision
Ball Screw/Brushless Servomotor (BMS280-AH-MS-E2500H) |
| Bus
Voltage |
Up
to 320 VDC |
| Continuous
Current |
Apk |
Up
to 3.8 A |
| Arms |
Up
to 2.7 A |
| Feedback |
|
Noncontact
Rotary Encoder (2500 line) |
| Resolution |
5
mm/rev lead |
0.5
µm with 2500 line Quadrature Encoder |
| Maximum
Travel Speed(1) |
5
mm/rev lead |
220
mm/s |
220
mm/s |
220
mm/s |
220
mm/s |
220
mm/s |
| Maximum
Load(2) |
Horizontal |
100
kg |
| Vertical |
60
kg |
| Side |
100
kg |
| Accuracy |
5
mm/rev lead |
±11
µm |
±13
µm |
±16
µm |
±16.5
µm |
±17.5
µm |
| Bidirectional
Repeatability |
5
mm/rev lead |
±1
µm |
| Straightness
and Flatness |
4
µm |
5
µm |
5
µm |
6
µm |
7
µm |
| Nominal
Stage Weight |
With
Motor |
20
kg (44.1 lb) |
21.2
kg (46.7 lb) |
22.4
kg (49.4 lb) |
23.7
kg (52.2 lb) |
24.9
kg (54.9 lb) |
| Less
Motor |
18
kg (39.7 lb) |
19.2
kg (42.3 lb) |
20.4
kg (45.0 lb) |
21.7
kg (47.8 lb) |
22.9
kg (50.5 lb) |
| Construction |
Black
Anodized Aluminum Body with Hardcoated Tabletop |
Notes:
1. Excessive duty cycle may impact stage accuracy.
2. Payload specifications are for single-axis system and based on
ball screw and bearing life of 2500 km (100 million inches) of travel.
3. Specifications are for single-axis systems, measured 25 mm above
the tabletop. Performance of multi-axis systems is payload and workpoint dependent. Consult factory for multi-axis or non-standard applications.
| Total Travel |
400 mm |
500 mm |
600 mm |
800 mm |
1000 mm |
| Drive System |
Precision Ball Screw/Brushless Servomotor
(BMS280-AH-MS-E2500H) |
| Bus Voltage |
Up to 320 VDC |
| Continuous Current |
Apk |
Up to 3.8 A |
| Arms |
Up to 2.7 A |
| Feedback |
Noncontact Rotary Encoder (2500 line) |
| Resolution |
5 mm/rev lead |
0.5 µm with 2500 line Quadrature Encoder |
| Maximum Travel Speed(1) |
5 mm/rev lead |
220 mm/s |
220 mm/s |
220 mm/s |
220 mm/s |
140 mm/s |
| Maximum Load(2) |
Horizontal |
100 kg |
| Vertical |
60 kg |
| Side |
100 kg |
| Accuracy |
5 mm/rev lead |
±19 µm |
±21 µm |
±23 µm |
±26 µm |
±27.5 µm |
| Bidirectional Repeatability |
5 mm/rev lead |
±1 µm |
| Straightness and Flatness |
9 µm |
11 µm |
13 µm |
16 µm |
19 µm |
| Nominal Stage Weight |
With Motor |
27.3 kg (60.2 lb) |
29.7 kg (65.5 lb) |
32.1 kg (70.8 lb) |
37 kg (81.6 lb) |
41.8 kg (92.2 lb) |
| Less Motor |
25.3 kg (55.8 lb) |
27.7 kg (61.6 lb) |
30.1 kg (66.4 lb) |
35 kg (77.2 lb) |
39.8 kg (87.7 lb) |
| Construction |
Black Anodized Aluminum Body with Hardcoated Tabletop |
Notes:
1. Excessive duty cycle may impact stage accuracy.
2. Payload specifications are for single-axis system and
based on ball screw and bearing life of 2500 km (100 million inches) of travel.
3. Specifications are for single-axis systems, measured 25
mm above the tabletop. Performance of multi-axis systems is payload and
workpoint dependent. Consult factory for multi-axis or non-standard
applications.
|
United
States [Change]
