| Total Travel |
300 mm |
400 mm |
500 mm |
600 mm |
| Drive System |
Precision
Ball Screw/Brushless Servomotor (BMS465-AH-MS-E2500H) |
| Bus Voltage |
Up to 320 VDC |
| Continuous Current |
Apk |
Up to 4.9 A |
| Arms |
Up to 3.5 A |
| Feedback |
Noncontact Rotary Encoder (2500 line) |
| Resolution |
5 mm/rev lead |
0.5 µm with 2500 line Quadrature Encoder |
| Maximum Travel Speed(1) |
5 mm/rev lead |
220 mm/s |
Maximum
Load(2) |
Horizontal |
150 kg |
| Vertical |
70 kg |
| Side |
150 kg |
| Accuracy |
5 mm/rev lead |
±17.5 µm |
±19 µm |
±21 µm |
±23 µm |
| Bidirectional Repeatability |
5 mm/rev lead |
±1 µm |
| Straightness and Flatness |
7 µm |
9 µm |
10 µm |
12 µm |
| Nominal Stage Weight |
With Motor |
39.6 kg (87.1 lb) |
43.5 kg (95.7 lb) |
47.4 kg (104.3 lb) |
51.3 kg (112.9 lb) |
| Less Motor |
36 kg (79.2 lb) |
39.9 kg (87.8 lb) |
43.8 kg (96.4 lb) |
47.7 kg (104.9 lb) |
| Construction |
Black Anodized Aluminum Body with Hardcoated Tabletop |
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|
|
|
|
|
|
|
Notes:
1. Excessive duty cycle may impact stage accuracy.
2. Payload specifications are for single-axis system and based
on ball screw and bearing life of 2500 km (100 million inches) of travel.
3. Specifications are for single-axis systems, measured 25
mm above the tabletop. Performance of multi-axis systems is payload and
workpoint dependent. Consult factory for multi-axis or non-standard
applications.
| Total
Travel |
800
mm |
1000
mm |
| Drive
System |
Precision
Ball Screw/Brushless Servomotor (BMS465-AH-MS-E2500H) |
| Bus
Voltage |
Up
to 320 VDC |
| Continuous
Current |
Apk |
Up
to 4.9 A |
| Arms |
Up
to 3.5 A |
| Feedback |
Noncontact
Rotary Encoder (2500 line) |
| Resolution |
5
mm/rev lead |
0.5
µm with 2500 line Quadrature Encoder |
| Maximum
Travel Speed(1) |
5
mm/rev lead |
220
mm/s |
140
mm/s |
Maximum
Load(2) |
Horizontal |
150
kg |
| Vertical |
70
kg |
| Side |
150
kg |
| Accuracy |
5
mm/rev lead |
±26
µm |
±27.5
µm |
| Bidirectional
Repeatability |
5
mm/rev lead |
±1
µm |
| Straightness
and Flatness |
14
µm |
17
µm |
| Nominal
Stage Weight |
With
Motor |
59.1
kg (130 lb) |
66.9
kg (147.2 lb) |
| Less
Motor |
55.5
kg (122.1 lb) |
63.3
kg (139.3 lb) |
| Construction |
Black
Anodized Aluminum Body with Hardcoated Tabletop |
Notes:
1. Excessive duty cycle may impact stage accuracy.
2. Payload specifications are for single-axis system and
based on ball screw and bearing life of 2500 km (100 million inches) of travel.
3. Specifications are for single-axis systems, measured 25
mm above the tabletop. Performance of multi-axis systems is payload and
workpoint dependent. Consult factory for multi-axis or non-standard
applications.
|
United
States [Change]
