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Aerotech designs and manufactures motion control and positioning systems and components for high precision wafer processing, flat-panel display fabrication, scanning electron microscopy, wafer bumping, 450 mm wafer manufacturing, lithography equipment, and advanced laser micromachining. We also specialize in systems and components for vacuum applications, such as EUV lithography and scanning electron microscopy. So whether a customer needs off-the-shelf wafer bumping components or a custom-engineered scanning electron microscopy system manufactured and tested to exacting specifications, Aerotech can provide the optimal solution for your application.

Aerotech manufactures complete, multi-axis, vacuum-compatible motion systems for high-performance applications such as Extreme Ultraviolet (EUV) Lithography and other lithography equipment, Scanning Electron Microscopy (SEM), Ion Beam Profiling, E-Beam Inspection, and wafer bumping. These systems include ultra-high accuracy with nanometer-level in-position stability.
For applications such as scanning electron microscopy, vacuum preparation for 10^-8 torr (1.3 x 10^-8 mbar) is achieved by incorporating vented hardware, vacuum compatible lubrication, and special cabling. Custom systems can achieve 10^-9 torr vacuum levels. Aerotech can provide systems with partial pressure (outgassing) limits at specific atomic mass units. Systems are RGA verification tested.

For applications such as scanning electron microscopy, Aerotech also manufactures brushless linear and rotary motors with tightly controlled magnetic fields that can be liquid or gas-cooled to improve thermal management. Finally, special handling and cleaning procedures along with careful material selection allow for the lowest Total Mass Loss (TML) and Collected Volatile Condensable Materials (CVCM) possible.

View our online brochure here.

Download a PDF version of our Automation Solutions for Semiconductor and Flat-Panel Display Manufacturing brochure.