1996: Introduced the AGS10000 linear-motor-driven gantry.
2002: FiberMax wins NFOEC 2002 Attendees’ Choice
1997: Introduced the BA Intellidrive.
Award. Automation 3200 named Design News 2002 Best
1998: Patent on linear motor driven vertical lift stage (U.S.
Product of the Year finalist and PD & D Engineering
Patent #5,731,641). Won the Machine Design Achievement
Awards 2002 Top 50 Product. Patents on a calibrated
Award for slides and ways. Introduced the BLMF series flat
encoder multiplier (U.S. Patent #6,356,219 and #6,501,403),
linear motors and BAL linear amplifier.
on a direct-drive tilt and goniometer stage (U.S. Patent
1999: Introduced the ABL2000 linear air-bearing stage and
#6,442,851), and on a small footprint vertical lift and rota-
the U500PCI PC-bus-based motion controller.
tion stage (U.S. Patent #6,486,574).
2000: Won the Machine Design Achievement Award for
2003: Aerotech developments include the ADRT and
slides and ways.
ADR160 Series Rotary Stages; the AVL113/125 Vertical
2001: Aerotech develops the first software-based, 32 axis
Lift Stages; the ASR2000 High-Speed Spindle; the
motion, vision and I/O controller — the Automation 3200.
ATS1000, ATS1100-H, and ALS Series Linear Stages;
The Automation 3200 is voted one of the year’s 50 most
the ABL1000 Air-Bearing Stage; the BL Linear Amplifier;
innovative products by the readers of Design News.
and continuous improvements to the A3200 32-Axis ,
FiberAlign 130 wins OFC 2001 Attendees’ Choice Award.
Motion Vision and I/O System. Aerotech expands headquarters.
 
1990:
1970s:
Introduced the U500 ISA PC-bus-based motion con-
Introduced first ball-screw-based positioning systems
troller and the UNIDEX 511 stand-alone, multi-axis motion
with advanced linear servo drives. This represented a revolu-
controller.
tionary advancement in system throughput - five times better
than lead screw and stepper motor technology. Adapted and
1991: Patent on successive fringe detection position interfer-
widely deployed by IBM, DuPont, and Westinghouse. Patent
ometry (U.S. Patent #5,018,862). Introduced AOM series
on coarse and fine adjustment positioning mechanism (U.S.
AZ/EL optical mounts.
Patent #3,727,471). Established subsidiary in Germany.
1992: Patent on quadrature error correction (U.S. Patent
1980s: Introduced UNIDEX series microprocessor-based
#5,134,404). Introduced the BLM series linear brushless
motion controllers. Developed brushless amplifier and rotary
motors.
motors which increased throughput, reliability, and
1993: Introduced the BM series brushless rotary motors.
decreased maintenance. Patents on a switching amplifier
with MOSFET driver circuit (U.S. Patent #4,554,512), a
1994: Introduced the ABL8000 air-bearing stage and BA
milling machine tool changer (U.S. Patent #4,426,763), a
Series amplifiers.
microstepping translator controller (U.S. Patent #4,652,806),
1995: Introduced the ALS2000 linear motor stages series.
and for closed-loop torque angle control of a synchronous
Developed the ABL9000 H-bridge air-bearing stage.
motor (U.S. Patent #4,884,016). Established subsidiary in
the United Kingdom.

Aerotech's Expanded Clean-Room Capabilities

Aerotech at a Glance

Semiconductor and Flat-Panel Applications

Solutions for Reticle Inspection

Solutions for Lithography

Solutions for Defect Detection (Optical Inspection)

Solutions for Electrical Characterization

Solutions for Macro-Defect Detection

Solutions for Thin-Film Measurement

Solutions for Vacuum Applications

Solutions for Flat-Panel Display Manufacturing

Linear Solutions

Z-Axis Solutions

Rotary Solutions

Specialty Solutions

Component Solutions

Automation 3200 Digital Automation Platform

Intelligent, Networked Drives

Simplfied Integration...Reduced Cost

Machine Retrofits

Fully Integrated Automation Solutions

Engineered Systems

ISO Registered
Award-Winning Aerotech

Worldwide Training & Support
Aerotech Timeline

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