A E R O T E C H ’ S   E X P A N D E D   C L E A N - R O O M   C A P A B I L I T I E S
E X P A N D   Y O U R   S E M I C O N D U C T O R   P R O D U C T   O P T I O N S
In order to address the increased demand for super-clean
egress. Systems may be pre-checked or burned-in within this
motion systems, Aerotech is pleased to announce the
area without impacting the precision final assembly and
expansion of its clean-room facilities to include large system
metrology operations being conducted within the main
ISO 14644-1 Class 6 (Federal Standard 209E Class 1000)
clean-room.
and cell specific ISO Class 5 (Class 100) capabilities. The
large active area includes pre-/post-dressing areas, dedicated
The main clean-room assembly area is also equipped with a
product transfer, and large main product assembly areas.
large-capacity crane that can access all parts of the room,
dramatically improving material flow by minimizing the
The product transfer area is designed to prevent any
requirement for internal material handling equipment.
contamination of the main clean-room area and is utilized for
Actively isolated three-meter granite substrates enable
unpacking and packaging precision parts, assemblies, or
testing of both nanometer-level positional stability systems
even complete system tools. A large-capacity crane can
and highly dynamic 3 g acceleration stage systems. While
reach outside of the transfer area, pick up the object, and
measurements are in progress, air flow may be controlled
move it inside without the product ever touching the floor,
over individual areas to minimize air turbulence.
further minimizing contamination from external material
handling equipment. The transfer area is hermetically-sealed
This clean-room expansion project is just another example of
during this "soaking” process so that contaminants are
Aerotech’s commitment to our customers and their needs.
removed and no contamination is introduced into the main
We will continue to advance our capabilities to meet and
clean-room area or deposited on the parts during material
exceed future customer requirements.
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Aerotech's Expanded Clean-Room Capabilities

Aerotech at a Glance

Semiconductor and Flat-Panel Applications

Solutions for Reticle Inspection

Solutions for Lithography

Solutions for Defect Detection (Optical Inspection)

Solutions for Electrical Characterization

Solutions for Macro-Defect Detection

Solutions for Thin-Film Measurement

Solutions for Vacuum Applications

Solutions for Flat-Panel Display Manufacturing

Linear Solutions

Z-Axis Solutions

Rotary Solutions

Specialty Solutions

Component Solutions

Automation 3200 Digital Automation Platform

Intelligent, Networked Drives

Simplfied Integration...Reduced Cost

Machine Retrofits

Fully Integrated Automation Solutions

Engineered Systems

ISO Registered
Award-Winning Aerotech

Worldwide Training & Support
Aerotech Timeline

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