C O M P O N E N T   S O L U T I O N S
f o r   S E M I C O N D U C T O R   A P P L I C A T I O N S
Frameless rotary motors
Five frame sizes
Frameless design for easy integration into OEM machines
Slotless stator and high-pole-count rotor provide zero cogging for
exceptional velocity and position control
Up to 146 Nm of peak torque and 36.5 Nm continuous torque
Linear motors
Advanced design yields 49% greater continuous output force than competitive models
Zero-cogging design allows super-smooth velocity and position control
Special magnet options available for increased force output
Utilizing a symmetrical mounting pattern, the modular tracks mount end-to-end for
unlimited travel
Optional cooling for higher rms force
Up to 4740 N of peak force and 1200 N of continuous force
Slotless, brushless motors
Standard NEMA sizes for easy integration and retrofitting
Advanced slotless design yields superior velocity and position control
Brushless technology provides maintenance-free use and delivers higher
acceleration than brush counterparts
Brushless motors
Standard sizes (NEMA) for easy integration and retrofitting
Wide range of torques cover most applications (0.5 - 75 Nm)
Advanced 8-pole design matched with skewed stator minimizes torque ripple and
cogging for smoother velocity control
Rugged construction ideal for 24/7 production applications
Optional IP65 through IP67 construction allows use in harsh environments
Aerotech's Expanded Clean-Room Capabilities

Aerotech at a Glance

Semiconductor and Flat-Panel Applications

Solutions for Reticle Inspection

Solutions for Lithography

Solutions for Defect Detection (Optical Inspection)

Solutions for Electrical Characterization

Solutions for Macro-Defect Detection

Solutions for Thin-Film Measurement

Solutions for Vacuum Applications

Solutions for Flat-Panel Display Manufacturing

Linear Solutions

Z-Axis Solutions

Rotary Solutions

Specialty Solutions

Component Solutions

Automation 3200 Digital Automation Platform

Intelligent, Networked Drives

Simplfied Integration...Reduced Cost

Machine Retrofits

Fully Integrated Automation Solutions

Engineered Systems

ISO Registered
Award-Winning Aerotech

Worldwide Training & Support
Aerotech Timeline

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