S
O L U T I O N S f o r
D
E F E C T D E T E C T I O N ( O P T I C A L I N S P E C
T I O N )
An
integral element of every wafer fabrication facility is its
Aerotech
direct-drive linear motors allow for high-speed
optical
(lightfield and darkfield) inspection system. These
surface
characterization tools detect a wide variety of defects
scanning
and fast turnaround thus maximizing inspection
including
voids, pits, and scratches in the wafer surface.
tool
throughput.
Smooth,
high-speed raster scanning is required to meet the
needs
of today’s fabrication facility. Aerotech’s ABL9000
Aerotech
offers a wide variety of axes that can be
has
long been the standard for this type of inspection by
mounted
on an XY stage, including theta axes for pattern
providing
superior dynamic performance characteristics.
alignment
and Z axes for focus adjustment.
Aerotech’s
experienced engineering group can assist in
developing
a custom system to meet your specific needs.
Aerotech-supplied
machine
base
and isolation system
minimize
integration time.
Integrated
electronics
Open-frame
stage for microscope applications.
Automation
3200 plot utility showing
raster
scan pattern.