S
O L U T I O N S f o r
E
L E C T R I C A L C H A R A C T E R I Z A T I O N
Circuit
parameter characterization is essential for process
Standard
travel options accommodate 300 mm wafers,
control
and stability. Understanding the physical and
electrical
properties of the transistor early in the fabrication
load
and unload, and multiple sensor locations.
process
allows for understanding and control of the final
device.
Aerotech produces a broad range of motion solutions
A
wide footprint lower axis dramatically improves planar
for
electrical monitoring and characterization.
flatness
by minimizing the amount of upper axis
overhang.
Noncontact
linear encoders and linear motors ensure
high
accuracy wafer placement.
Noncontact
linear encoders and
Many
standard travel options
linear
motors ensure high
are
available for 300 mm
accuracy.
wafers,
load and unload, and
multiple
sensor locations.
Wide-body
design minimizes
flatness
variations which
translate
into focus direction
errors.