S O L U T I O N S   f o r
F L A T - P A N E L   D I S P L A Y   M A N U F A C T U R I N G
Flat-panel display inspection and manufacturing applications
θ
ABL9000 XYZ
system optimizes dynamic
present several challenges for motion system suppliers
including optimizing the dynamic characteristics of the
characteristics, including straightness and yaw, to
system while accommodating increasingly longer travels. To
ensure scan-line parallelism throughout full travel.
meet these demands, we use our patented technologies as
well as our vast experience in developing leading-edge
Scalable mechanics can accommodate a multitude of
motion solutions to design systems ideally suited for flat-
panel sizes.
panel display applications.
A granite reference ensures optimal flatness
characteristics.
Any system can be customized to incorporate a large
number of bridge structure configurations.
AVL1000
Optional high-stiffness Z axis provides
ARA1000
focus adjustment to accommodate panel
thickness variations while at the same
Optional direct-drive rotary stage provides
time minimizing angular errors induced
highly accurate rotational motion for
during XY turns.
fiducial/pattern alignment.
This gantry-style FPD inspection station
features a travel of 1800 x 800 x 200 mm.
Aerotech's Expanded Clean-Room Capabilities

Aerotech at a Glance

Semiconductor and Flat-Panel Applications

Solutions for Reticle Inspection

Solutions for Lithography

Solutions for Defect Detection (Optical Inspection)

Solutions for Electrical Characterization

Solutions for Macro-Defect Detection

Solutions for Thin-Film Measurement

Solutions for Vacuum Applications

Solutions for Flat-Panel Display Manufacturing

Linear Solutions

Z-Axis Solutions

Rotary Solutions

Specialty Solutions

Component Solutions

Automation 3200 Digital Automation Platform

Intelligent, Networked Drives

Simplfied Integration...Reduced Cost

Machine Retrofits

Fully Integrated Automation Solutions

Engineered Systems

ISO Registered
Award-Winning Aerotech

Worldwide Training & Support
Aerotech Timeline

Download PDF