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o r S E M I C O N D U C T O R A P P L I C A T I O N S
ABL9000
Planar Air-Bearing
The
ABL9000 is designed to meet the exacting
requirements
of wafer, flat panel display, and optical
inspection
and fabrication. It incorporates an active
preload
on both vertical and horizontal surfaces, and the
opposing
thin-film pressure maintains the bearing
nominal
gap tolerance. This design, in addition to the
large
air-bearing surface that distributes the load over a
large
surface area, results in a stage with outstanding
stiffness
that is ideal for heavy or offset loading.
ABL3600
Open Frame Air-Bearing
The
ABL3600 is a high performance open-frame air
bearing
with dual-encoder feedback on both axes.
Designed
for high-end optical inspection and fabrication
applications,
the ABL3600 has superior dynamic
performance.
Planar construction minimizes overall
height
while the fully preloaded air-bearings provide
exceptional
stiffness. In addition, optional tip-tilt and
theta
motion can be incorporated into the design.
ABG10000
Air-Bearing Gantry
The
ABG10000 air-bearing gantry uses our own high-
performance
linear motors to drive the system to speeds
of
1 m/s and accelerations of 0.5 g. Feedback is from a
rugged
noncontact optical linear encoder. The ABG10000
incorporates
an active preload on both vertical and
horizontal
surfaces. This design, in addition to the large
air-bearing
surface that distributes the load over a large
surface
area, results in a stage with outstanding stiffness
that
is ideal for heavy or offset loading.