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I N E A R S O L U T I O N S
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o r S E M I C O N D U C T O R A P P L I C A T I O N S
ABL1000
Air-Bearing
The
ABL1000 stages are the highest performance
miniature
air-bearing stages available. The linear
positioner
is a fully preloaded, noncontact design. Driven
by
a noncontact linear brushless servomotor, this stage
proves
the ultimate solution whether the application
requires
small, accurate steps or constant smooth
velocity.
Superior magnetic field and motor coil design
result
in the highest force output of any miniature air-
bearing
stage.
ABL2000
Air-Bearing
The
ABL2000 combines excellent pitch/yaw
characteristics
with unsurpassed velocity control that is
necessary
for wafer imaging, defect detection, and
coating
applications. By utilizing a magnetic preload, the
ABL2000
features a smaller cross-section than typical
air-bearing
stages without sacrificing load capability. The
noncontact
air bearing, noncontact linear motor drive, and
noncontact
feedback device ensure years of maintenance-
free
operation at the highest performance levels.
ABL8000
Air-Bearing
The
ABL8000 incorporates a modified cross-section
design
that dramatically increases stiffness and stability,
which
is useful for large payloads where the C.G. is off
the
carriage centerline. Proprietary manufacturing tech-
niques
result in a stage with unsurpassed geometrical
characteristics.
The air bearing has an inherent averaging
effect
that maximizes performance, yielding superior
pitch,
roll, yaw, straightness, and flatness specifications.