L
I N E A R S O L U T I O N S
f
o r S E M I C O N D U C T O R A P P L I C A T I O N S
ALS130
Linear Stage
The
ALS130, with its low profile and outstanding
performance
characteristics, is the ultimate solution for
high-accuracy
alignment stations. An optional pneumatic
counterbalance
can be added for a vertical application
such
as camera focus.
ALS20000
Linear Stage
The
ALS20000 was designed to have exceptional
velocity
control, low vibration, high accuracy, and
excellent
throughput, making it the ideal solution for
wafer
inspection applications. A multitude of cable
management
options are available to provide the ultimate
in
design flexibility.
ALS3600
Open-Frame Stage
The
demand for a high-accuracy, robust, open-frame
stage
is met with the ALS3600. This dual-axis, large
aperture,
open-frame stage addresses the needs of
scanning
microscopy, and wafer and mask inspection.