S
O L U T I O N S f o r
L
I T H O G R A P H Y
Lithography,
including optical, direct write, and imprint,
Planar-style
air bearing minimizes overall system
defines
the surface dimensions of the circuits and is
continuously
being pushed to new limits. Decreasing feature
height,
reducing the effects of Abbe error.
sizes
coupled with high throughput requirements place
stringent
demands on the motion system. Aerotech produces
Automation
3200 control electronics provide high
specialized
systems that are ultra-stable when in position and
bandwidth
and resolution to allow high speed, high
exceptionally
smooth when scanning.
accuracy
operation.
Aerotech
can provide an optional machine base and
active
vibration isolation (AVI) system to ensure
optimum
step/scan performance.
Custom
granite structures are
available
to fit virtually any
optics-train
design.
The
ABL9000 uses Aerotech’s proprietary
Ultra-high
stiffness
linear
motor technology.
air-bearing
design
provides
superior
step
and scan
performance.
Optional
laser interferometer feedback provides high-accuracy linear
and
angular measurements at the wafer height.