S
O L U T I O N S f o r
M
A C R O - D E F E C T D E T E C T I O N
Particle
and foreign materials as well as gross wafer errors
Aerotech
direct-drive linear motors provide high-speed
are
tackled with macro defect detection tools. High-speed
operation,
coupled with stringent geometric characteristics
scanning
and fast turnaround maximizing inspection tool
and
smooth motion require a top-notch electromechanical
throughput.
system.
Aerotech’s ABL2000 air-bearing linear stage
coupled
with state-of-the-art motion control meet this need.
Aerotech
offers a wide variety of axes that can be
mounted
on the XY stage, including theta axes for
pattern
alignment and Z axes for focus adjustment.
Aerotech’s
extensive engineering group can assist in
developing
a custom system to meet your specific needs.
High-accuracy
linear air-
bearing
shown with a wafer
chuck.
High-accuracy
linear air-
bearing
system shown with
optional
laser interferometer.