S
O L U T I O N S f o r
R
E T I C L E I N S P E C T I O N
The
reticle (photomask) is the source of a wafer’s pattern
Open
frame air-bearing combines ultra-smooth motion
and
therefore requires detailed inspection and analysis to
ensure
quality before commissioning. As design rules shrink,
and
a large aperture into a single system for high-
circuit-error-causing
defects such as contamination, cracks,
precision
front and backside mask inspection.
and
pattern distortions increase. Aerotech has supplied high
performance
open-frame air-bearing systems specifically
Optional
piezo-driven tip-tilt stages provide parallelism
designed
to address the needs of reticle inspection tool
adjustment
for the mask holder.
manufacturers.
Each
linear air-bearing axis incorporates dual linear
motors
and dual linear encoders to provide excellent
accuracy,
repeatability, and yaw performance.
Flexible
cable management design can accommodate a
wide
variety of customer cabling requirements.
A
typical reticle inspection program screen.
ABL3600XY
Planar
construction minimizes
overall
height.
Optional
tip-tilt and theta motion can be
Fully
preloaded air-bearings
incorporated
into the design.
provide
excellent stiffness.