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O T A R Y S O L U T I O N S
f
o r S E M I C O N D U C T O R A P P L I C A T I O N S
ABR1000
Rotary Air-Bearing
The
ABR1000 is designed to meet the exacting
requirements
of wafer, flat panel display, and optical
inspection
and fabrication. The ABR1000 utilizes
Aerotech’s
S-series slotless, brushless motor that uses an
advanced
magnetic circuit design to produce high torque
output
with minimal heat generation. The slotless design
is
inherently zero-cogging and torque-ripple free. This
makes
the ABR1000 ideal for applications requiring
smooth
scan velocities at low or high speeds.
ASR2000
Spindle
The
ASR series of direct-drive spindles provides superior
angular
positioning and velocity control. Applications
include
disk drive testing, imaging applications, and
precision
wafer inspection.
Superior
Mechanical Design
Matched
angular contact bearing sets are used to
maximize
performance with respect to error motions.
This
unique spindle design includes externally accessible
balancing
screws that can be adjusted with final payload
in
place to a G 0.4 to G 1.0 tolerance. The spindle design
utilizes
labyrinth-type sealing to minimize particle
migration
from the spindle. These spindles have been
certified
for Class 1 clean-room operation. An integral
rotary
union is provided for pneumatic or vacuum supply.
Air-bearing
versions of our spindles are also available.