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O T A R Y S O L U T I O N S
f
o r S E M I C O N D U C T O R A P P L I C A T I O N S
WaferMax
T Rotary Stage
The
WaferMax T rotary stage is an excellent choice for
applications
that require high performance in a low-
height
package. Originally designed for the demands of
precision
wafer inspection, the WaferMax T has been
applied
to a multitude of applications. A standard 25 mm
aperture
allows for easy pass-through of vacuum lines
where
limited rotation is required. If continuous rotation
is
necessary, an optional rotary union can be
incorporated.
The tabletop includes a standard mounting
pattern
that allows for easy wafer-chuck mounting.
ADRS
Rotary Stage
ADRS
series rotary stages feature a high torque output,
direct-drive
brushless servomotor. The ultra-low-profile
of
the stage reduces the effective working height of the
system,
minimizing Ňstack-up” related errors. The ADRS
series
provides a clear aperture that can be used for
product
feed-through or laser beam delivery.
ADRT
Rotary Stage
ADRT
series direct-drive rotary stages provide superior
angular
positioning and velocity control. Applications
range
from indexing to high-speed laser machining to
precision
wafer inspection. Dual large diameter bearings
are
used to maximize performance with respect to
wobble,
moment stiffness, and repeatability. The large
diameter
bearings permit large payloads without
compromising
performance.
ARA1000
Rotary Actuator
The
ARA1000 rotary actuator is an excellent choice for
applications
that require high performance in a low-
height
package. Originally designed for the demands of
precision
flat-panel manufacturing, the ARA1000 has
been
applied to a multitude of applications. A standard
57.2
mm aperture allows for easy pass-through of
vacuum
lines where limited rotation is required. The
tabletop
includes a standard mounting pattern that allows
for
easy chuck mounting.