S
E M I C O N D U C T O R A N D F L A T - P A N E L A P P
L I C A T I O N S
Wafer and Flat-Panel Display (FPD) fabrication require manufacturing and
process control equipment designed and built
with
cutting-edge automation technology. Both process and inspection tool manufacturers
have relied upon Aerotech for
well
over 30 years to satisfy their production and R&D motion needs. Our commitment
to getting the job done right, on time,
and
within budget is unsurpassed.
AEROTECH
ADVANTAGES IN THE SEMICONDUCTOR INDUSTRY
Top-of-the-line
planar air-bearing mechanics for ultra-
Synchronization
of up to 32-axes of real-time motion in
smooth
velocity control and superior dynamic geometric
one
PC, eliminating integration of multiple controllers for
high
axis-count systems, and increasing reliability.
characteristics.
Full
line of motion axes including linear, rotary, lift, and
Extensive
diagnostics simplify system debugging.
goniometric
stages.
Automation
3200 integral PLC and robot motion control
decrease
changeover times, or ease integration with
Multiple
levels of subsystem components are available
including
active vibration isolation, machine base,
existing
systems to leverage your investment.
integrated
electronics, and specialized granite structures.
High
performance, deterministic network (FireWire®)
provides
distributed motion generation and
Mechanics
can be prepared for all of the following
synchronization
while all-digital drives support high
environments:
clean room, vacuum, and low-magnetic
bandwidth
local control for each axis, increasing
field.
performance.