S
P E C I A L T Y S O L U T I O N S
f
o r S E M I C O N D U C T O R A P P L I C A T I O N S
MaskAlign
100 and 150
θ
The
MaskAlign 100/150 is an XY
motion
platform that
has
a built-in alignment system that guarantees proper
mask
placement with minimal effort. Fixed pins are used
to
set the mask location while two locating mechanisms
push
the mask into its final position. Once the mask is
properly
aligned, an integral vacuum channel holds the
mask
in place. All of these features assure proper mask
alignment
and retention during the writing process.
WaferMax
ZT
The
WaferMax ZT is a perfect solution for applications
requiring
both Z and theta wafer alignment in a low-
height
package. This system provides 360° of rotary
motion
and 5 mm of lift.
Wafer
Chucks
Aerotech
manufactures a wide variety of chucks for
wafer
and flat-panel substrate retention.