S
O L U T I O N S f o r
T
H I N - F I L M M E A S U R E M E N T
From
ellipsometry and reflectometry to stylus
The
stage cross-section is maximized in order to provide
measurements,
today’s fab has a large number of options
available
for the characterization of thin films. Aerotech has
the
superior stiffness required in thin-film measurement
developed
a wide variety of motion systems to address these
applications.
needs.
Clean-room
compatible designs incorporate special
cable
management, lubrication, and a waycover.
Multiple
encoder options allow for two levels of stage
performance.
A
clean-room compatible cable
management
system (CMS) is part of
the
ALS20000 XY stage.
Automation
3200 digital automation platform with Ndrive digital drive and Npaq drive rack.
Aerotech provides turnkey solutions with high-
performance
mechanics and electronics.