S
O L U T I O N S f o r
V
A C U U M A P P L I C A T I O N S
Aerotech manufactures complete vacuum-compatible
motion systems for high-performance applications such as
Extreme Ultraviolet (EUV) Lithography,
Scanning Electron
Microscopy (SEM), Ion Beam Profiling, E-Beam
Inspection, and wafer bumping.
Platforms are available in a wide variety of multi-axis configurations
to achieve the complex motions you require. These systems include ultra-high
accuracy with nanometer-level in-position stability. Vacuum preparation
for 10-8 torr (1.3 x 10-8 mbar) is achieved by
incorporating vented hardware, vacuum compatible lubrication, and special
cabling. Custom systems can achieve 10-9 torr vacuum levels.
Aerotech can provide systems with partial pressure (outgassing) limits
at specific atomic mass units. Systems are RGA verification tested.
Aerotech also manufactures brushless linear and rotary motors with tightly
controlled magnetic fields that can be liquid- or gas-cooled to improve
thermal
management. Finally, special handling and cleaning
procedures along with careful material selection allow for
the lowest Total Mass Loss (TML) and Collected Volatile
Condensable Materials (CVCM) possible. |
Aerotech
Vacuum System Applications Include:
EUV
Lithography
Scanning
Electron Microscopy
Ion-Beam
Profiling
E-Beam
Inspection
Aerotech
Vacuum Systems Feature:
High
Duty Cycle
Thermal
Management
Low
Magnetic Fields
Engineered
to minimize outgassing and contamination
Vacuum
preparation for 10-8
to 10-9 torr is achieved by
incorporating vented
hardware, vacuum compatible
lubrication, and special
cabling.
Aerotech’s
clean-room expansion represents our
Aerotech
vacuum systems are available
commitment
to our vacuum and clean-room system
in
a wide variety of multi-axis configura-
customers
and their future needs.
tions
to achieve complex motions.
