Z
- A X I S S O L U T I O N S
f
o r S E M I C O N D U C T O R A P P L I C A T I O N S
WaferMax
Z Lift Stage
The
WaferMax Z represents a significant breakthrough in
vertical
alignment of high-precision components in one
compact
package. Its superior noncontact linear motor
drive
employs a high-accuracy encoder for direct position
feedback.
The WaferMax Z easily combines with the
WaferMax
T rotary stage to provide a compact, two-axis
solution
for alignment and focus.
AVL1000
Lift Stage
The
AVL1000 represents a significant breakthrough for
applications
that require Z articulation for large payloads
such
as flat-panel display processing. Multi-axis systems
with
high load inertia can suffer from mechanical
stability
problems that limit total machine throughput.
The
AVL1000 eliminates this problem through a
proprietary
design that significantly increases stage
stiffness.
The AVL1000 has a wide footprint that
increases
stiffness by separating the bearing elements as
far
as possible. This design also incorporates mechanical
elements
that fully constrain the carriage and virtually
eliminate
undesired motion.
AVS100
Series Lift Stage
The
AVS100 series offers the ideal solution for
applications
that require very small incremental
movements
in elevation above a horizontal plane. Their
small
profiles and precise motion capabilities make these
stages
ideal for use in semiconductor wafer inspection
and
testing, and automated tool alignment.