Integrated XY Linear Motor Stage for Unparalleled Geometric Performance

Integrated, low-profile, XY, linear-motor stage

Excellent geometric performance (straightness to ±0.4 µm; flatness to ±1 µm)

Anti-creep, precision crossed-roller bearings

Large selection – nine models in travel and accuracy

Aerotech’s PlanarDL-series stages offer excellent geometric and dynamic performance in a compact, low-profile and cost-effective package. Available in nine different travel and performance configurations, this stage is the ideal solution for applications ranging from high-accuracy surface profilometry to high-speed semiconductor and LED wafer scribing.

Superior Stage Design
With an optimized structure, components with exacting precision, Aerotech’s own direct-drive motor technology and an integrated cable management system, the PlanarDL debuts as an industry leader in planar performance.

The PlanarDL XY design allows for unparalleled planar geometric performance in applications where straightness and flatness of motion are critical. High-precision, anti-creep crossed-roller bearings, precision-machined surfaces and Aerotech linear motors driving through the axes’ center-of-stiffness result in exceptional geometric tolerances.

PlanarDL structural elements are optimized for high-dynamics and high-stiffness for the most demanding dynamic applications. Capable of achieving 1 m/s velocities and 1.5 g accelerations, the PlanarDL enables high-throughput, high-accuracy processing resulting in superior process yield and a low total cost of ownership. Unlike competitive products using recirculating bearings, the anti-creep crossed-roller bearings used in this design provide the smooth motion ideal for the most challenging scanning applications.

Noncontact Direct-Drive Technology
Only noncontact, direct-drive technology offers high-speed and accurate positioning coupled with maintenance-free operation and long service life. At the heart of the PlanarDL is Aerotech’s proprietary direct-drive technology. This drive technology allows for unmatched performance compared to other competitive screw-based and linear-motor designs.

The PlanarDL-200XY and -300XY stages are both available with one or two motors per axis, allowing optimization of each individual axis for the specific application and process parameters. Regardless of the number of motors selected, the resulting drive force acts through the centers of friction and stiffness resulting in superior geometric performance and accuracy.

Integrated Cable Management
The cable management system on the PlanarDL is integrated into the stage and optimized for long life and performance. Additional standard options are available for extra servo axes or air/vacuum lines for vacuum chucks or other process pneumatics.

Extreme Positioning Performance
Aerotech's PlanarDL series is available in three positioning performance options: BASE, PLUS and ULTRA. Relying upon decades of experience in system-level design including not only positioning mechanics, but also software and electronics, Aerotech has developed advanced technologies to push the envelope of precision. The high-performance PLUS and ULTRA options are available to enable accuracies and straightness values down to ±400 nm and orthogonality down to 1 arc second.