Compact 75 mm width with travel to 100 mm
Precision ground ball-screw drive
DC servo or stepper motor
Anti-creep crossed-roller bearings
High resolution (0.1 µm), repeatability (±0.75 µm) and accuracy (±1.0 µm)
Optional bellows waycovers
The MPS75SL is a compact, high-performance linear positioning stage that is perfect for the confines of the laboratory while providing the high reliability required in a production environment. It is the ideal choice for measurement, testing, accurate alignment and component assembly.
The precision ground ball-screw provides exceptional accuracy, repeatability and ultra-fine positioning resolution capability to 0.1 micron. The DC servomotor is equipped with a rotary encoder. The anti-creep crossed-roller linear bearings provide smooth travel and excellent payload characteristics.
Optional Vacuum Preparation
The MPS75SL is available with optional vacuum preparation to 10-6 Torr. It is the perfect compact stage choice for today's demanding vacuum applications in markets such as semiconductor manufacturing and inspection, optics fabrication and military/aerospace.
An optional breadboard mounting plate provides direct mounting to both English and metric breadboards. Bellows waycovers are available for use in dusty environments. Any of the models can be mounted in an XY configuration and, with the right-angle L-bracket, in XYZ configurations. It can also be mounted with the smaller MPS50SL stage.