Nano Engineering

Key Industry Expertise

  • Disk-Drive Fabrication
  • Fiber Alignment
  • Optical Delay Element Actuation
  • Sensor Testing
  • Scanning
  • Research and Development
  • MEMS
  • Government, Academic, Industry Labs

Achieve Your Goal

To achieve the goals of high performance nanopositioning systems - high dynamic performance, high accuracy, high resolution, and easy-to-use software - Aerotech used its considerable experience acquired since 1970 in the fields of mechanics, magnetics, electronics, computing, digital control systems, and electromechanical systems engineering to develop products to meet the current and future requirements of the nanotechnology industries. Aerotech's unique direct-drive, long-travel nanopositioners are for applications requiring nanometer and sub-arc-second accuracies while retaining travels up to 160 millimeters, and are suitable for both laboratory and industrial applications. Our QNP series piezo nanopositioners offer sub-nanometer positioning resolution and in-position stability with high positioning bandwidth for travels up to 600 µm.

Walk the Line

Our direct-drive nanopositioning stage line includes single- and dual-axis linear nanopositioners with 1 nm resolution, ±250 nm accuracy, and travels from 25 mm to 160 mm. Rotary nanopositioners provide 0.01 arc-second resolution, 0.005 arc-second in-position stability, and 360° continuous rotation, while our nanopositioning goniometers offer 0.05 arc-second resolution, a 20° rotation angle, and 150° per second speed. We've also developed vertical lift and "Z" axis nanopositioning stages with up to 1 nm resolution, <1 nm in-position stability, and up to 60 mm of travel.

Aerotech offers X, XY, and Z axis piezo nanopositioners in closed-loop or open-loop versions ideal for applications ranging from microscopy to optics alignment. QNP piezo stages are guided by precision flexures optimized using finite element analysis to ensure high-stiffness and long life. They use closed-loop feedback with a unique capacitive sensor design that yields positioning resolution to 0.15 nm, linearity to 0.007%, and repeatability to 1 nm. Closed loop travels range from 100 µm to 500 µm, with open-loop travels from 100 µm to 600 µm.

Driven to Succeed

Aerotech nanopositioning stages utilize advanced technology pioneered by Aerotech to achieve the highest level of positioning performance. This unique technology, packaged in an extremely small-profile and footprint, offers tangible advantages in many applications such as high-precision positioning, disk-drive fabrication, fiber alignment, optical delay element actuation, sensor testing, microscopy, and scanning processes that demand smooth and precise motion. Vacuum-prepared versions of our stages are available. We also offer complete packages including stage, control/drive, and sophisticated software designed for both ease of use and maximum functionality and efficiency. Whatever your nanopositioning application, Aerotech has the knowledge, skill, products, and support to make it a success.