Custom Engineered Motion Systems

Modern photonic devices are extremely sensitive to positional and angular misalignment. Movements of only a few microns or fractions of a degree can introduce significant insertion loss, reducing signal quality and device yield. Traditional active alignment methods were designed for single-channel devices and struggle to scale as channel counts increase.

7-axis motion subsystem used for nanometer-level positioning of a sample for synchrotron beamline applications Continuous travel air-bearing rotary and 100 mm travel linear air-bearing stage provide precise sample scanning Small X, Y and Z stages on top of the rotary air bearing provide sample centering and alignment adjustments Screw-driven goniometer with six degrees of travel…

Designed for ultra-precision and high-dynamic contouring The r-θ design allows control of the axes‘ linear and angular motion, offering additional motion flexibility and improving positioning and throughput Automation1 FLEX Distributed Amplifier Multi-Axis Servo Control System minimizes cable management and distributes amplifiers to reduce panel space, cable drag and particulate generation

Integrated serial- and parallel-kinematic positioning solution with six axes of total motion All direct-drive axes with nanometer- and sub-microradian-level positioning resolution Rotary slip ring allows for electrical signal pass-thru of sample XY positioning stage Uncoupled dual z-axes allow simultaneous control of z and tilt motion of sample Example applications include sample manipulation and small-part inspection

HexGen® HEX500 hexapod combined with ALAR325 provides precise 6-degree-of-freedom volumetric motion with continuous roll motion Large aperture of ALAR325 allows continuous line-of-sight Load capacities greater than 100 kg High-accuracy components allow precise alignments and adjustments with sub-micrometer precision Example applications include large part manipulation, sensor testing and satellite testing

Planar XY air-bearing designed for low error motions with >125 kg payload capacity and up to 100 N of process forces Air-bearing direct-drive z-axis with pneumatic counterbalances designed for 60 kg payloads and up to 100 N of process forces Laser interferometer feedback system (not shown) to minimize work point motion error Sensors designed into…

High-speed, lightweight carbon-fiber robot capable of performing up to 200 pick-place operations per minute with peak accelerations approaching 15g's. Break-away joint designs prevent permanent damage during accidental collisions. The robot and other motion axes are easily coordinated from an Aerotech motion control platform.

Split axis or gantry configurations Choose from mechanical or air-bearing systems Direct-drive linear motor stages Travel to 2.5 m High dynamic system stiffness for best accuracy

The air/mechanical-bearing planar XY motion system is an excellent choice for applications that require careful balancing of price and performance. This stage has been designed for demanding applications that require excellent step and scan performance. Applications include wafer inspection, display manufacturing and optical inspection and fabrication.