Multiple Technology Subsystem


Design Features

  • 10-axis processing station
  • Three axes of piezo nanopositioning, five axes of servo positioning, and two axes of manual positioning
  • All positioning controlled from a single control architecture utilizing an Aerotech motion controller
  • Integrated cable management to keep cable drag influences at a minimum in order to enable nano-scale positioning
  • Granite base designed and supplied by Aerotech
  • Precision alignments performed by Aerotech to ensure appropriate system operation
  • Applications include nano- and micro-assembly, advanced laser processing, sample characterization, and many more