Six-Axis Piezo Positioner

Description

Design Features

  • Full six degrees of positioning freedom in a minimized footprint design
  • Clear aperture allows more access for process tools
  • Low profile and open access to mounting locations
  • Direct capacitive feedback mechanisms enable nanometer-level positioning
  • Designed for low noise and excellent in-position stability
  • High stiffness for dynamic moves and millisecond-level step and settle profiles
  • Coordinated axes positioning utilizing Aerotech’s powerful motion controllers
  • Applications include advanced assembly and bonding, sample positioning, and many more