Ion Beam Profiling in Vacuum


Design Features

  • Deep vacuum (10-6 Torr) 6-axis system with vented hardware, special lubrication, and Teflon® cabling
  • High precision, long travel, liquid cooled linear-motor-driven x-y
  • High precision 2-axis gimbal with direct shaft-mounted rotary encoder position feedback
  • Fully coordinated 6-axis simultaneous motion with cubic spline contour profiles