Nmark AGV-HPO High Accuracy, Open Frame, Thermally Stable Galvo Scanner

Description

Design Features

  • Highest accuracy scanner available attains single-digit, micron-level accuracy over the field of view
  • Optical feedback technology significantly improves thermal stability
  • Industry-best resolution of >24 bits when used with Aerotech's Nmark CLS controller
  • Wide range of apertures and focal lengths, and many choices of mirror surface treatments for a variety of laser wavelengths
  • Open-frame design reduces cost and allows for more flexible laser entry
  • Right side and left side aperture options for side-by-side parallel processing

The Ultimate in Accuracy and Stability

The highly repeatable and thermally stable feedback sensors used on the AGV-HPO scanner systems can be calibrated down to single-digit, micron-level accuracy over the field of view (see figure below). With the extremely low thermal gain drift performance of the position transducers, complex, high-density laser machining applications that take long periods of time to complete will maintain consistent micron-level feature placement accuracy over the lifetime of the process. Likewise, high throughput applications will maintain consistent part-to-part quality without having to re-calibrate between parts.

Integration Flexibility

Most scanner control interfaces are on the same surface as the laser input aperture which can create interference problems if the laser beam path approaches the scanner from the top. The AGV-HPO control connections consist of two 300 mm cables terminated in 25-pin D-style connectors. These cables can be oriented in any direction and terminated on the machine to ensure there is no interference with beam delivery. The AGV-HPO is also available with right-side and left-side input apertures for “mirror image” machine builds or side-by-side scanner mounting with a single laser beam split to source both scanners.

Real-Time Process Visibility

The location of the AGV mirrors can be captured and analyzed in real time. With direct access to the positions of the scanner, the user no longer has to program delay parameters to compensate for lag and tracking errors in the servo system. The process can be optimized prior to marking the part, saving time and reducing material waste. The state of the laser can also be controlled based on in-position and velocity criteria, further reducing programming complexity.

Advanced Programming Features

The AGV utilizes all of Aerotech’s advanced motion and PSO (Position Synchronized Output) capabilities that have been developed for traditional servo-based laser processing applications. Contouring functions such as Acceleration Limiting can be used to automatically reduce speeds in tight corners or small radii to minimize overshoot. The laser can be triggered based on the position feedback of the mirrors with PSO to ensure consistent spot overlap as the scanner changes speed. Aerotech’s Infinite Field of View (IFOV™) function seamlessly combines servo and scanner motion to extend the marking capability of the scanner across the entire travel of the servo stages, eliminating stitching errors that can occur in a more traditional move-expose-repeat process.

Design Choices

The AGV family is available with 10, 14, 20, and 30 mm input apertures and can be equipped with an F-Theta or telecentric lens directly from Aerotech. Users can also acquire the focusing optic directly from a trusted supplier with Aerotech supplying a spacer ring to ensure that back reflections through the optic do not damage the scanner mirrors. Mirror coatings for a wide range of UV, visible, IR and CO2 wavelengths are supported.

Additional Resources

Galvo Calibration File Converter (GCFC) – Use the GCFC to create new, optimize existing, or convert third-party calibration files for operation with the Nmark CLS and Nmark SSaM.

In addition, the white paper Using the Galvo Calibration File Converter with the Nmark CLS outlines the procedures required to create new calibration tables and how to merge calibration tables for the Nmark CLS.

You may be interested in Aerotech's recent webcast, Accuracy of Combined Scanning and Servo Systems.

Summary: Linear and rotary actuators are often used to expand the effective working area of scanner/galvo marking heads. This presentation will discuss alignment, scaling, rotation, and stitching-induced errors and their combined impact on final part quality. Advanced error correction, path planning, and laser triggering techniques that help to minimize these errors will also be presented.

To access the archived presentation, please click HERE.

 

AGV-HPO_graph1

Specifications

Mechanical Specifications

Model AGV-10HPO AGV-14HPO AGV-20HPO AGV-30HPO
Beam Aperture 10 mm 14 mm 20 mm 30 mm
Maximum Scan Angle ±20°
Beam Displacement 13.0 mm 18.0 mm 25.1 mm 35.7 mm
Feedback Resolution 0.007 µrad
Repeatability(1)(2) 2 µrad
Dither 0.2 µradrms
Non-Linearity <0.01%
Gain Error 0.1 mrad
Thermal Drift Offset Drift(3) 20 µrad/°C
Gain Drift(3) 1 ppm/°C
Long-Term Offset Drift(2)(3) 10 µrad/12 hrs
Small Angle Response Time(4) 400 µs 800 µs
Marking Speed(5) 3 m/s 2.5 m/s 1.5 m/s 0.9 m/s
Positioning Speed(5) 12 m/s 9.5 m/s 4.5 m/s 3.0 m/s
Tracking Error(6) 0 µsec
Operating Temperature 25° ± 10°C
Mass 2.3 kg 2.4 kg 2.7 kg 3.1 kg
Material Aluminum (Black Anodize and Blue Paint)
MTBF (Mean Time Between Failure) 20,000 Hours
    1. Unidirectional; 3-sigma from mean position.
    2. After initial 4 hour warm-up, ambient temperature variation <0.5°C.
    3. Measured with galvo motors mounted in scan head.
    4. 0.1° mechanical step, settling to within 0.001° of final position.
    5. Typical performance with f = 160mm F-Theta objective.
    6. In traditional scanning systems the tracking error is used to set the delays between laser pulses in order to compensate for the lag between command and response. The Nmark CLS features Position Synchronized Output (PSO) capability that permits laser pulse commands to be tied directly to the position feedback of the galvo motors, thus providing laser scanner control with 0 (or near 0) tracking error.
    7. All angles are optical unless otherwise noted.
    8. All specifications are per axis unless otherwise noted.

Electrical Specifications

Model AGV-10HPO AGV-14HPO AGV-20HPO AGV-30HPO
Drive System Brushless Direct-Drive Galvano Motor
Feedback Noncontact Rotary Encoder
Maximum Bus Voltage ±40 VDC
Limit Switches Software Limits Only
Home Switch At Center

Mirror Specifications(1)

Wavelength 343 nm 355 nm 515 nm 532 nm 1030 nm 1064 nm 1552 nm

1030/515
/343 nm

1064/532
/355 nm

9.4 µm(2) 10.6 µm
Substrate Beryllium
Coating Dielectric
Reflectance >99%
Flatness λ/4 @ Wavelength of Use
Maximum CW Laser Power AGV-10HPO 100 W 40 W 100 W 40 W 100 W 100 W 100 W 40 W 40 W 20 W 50 W
AGV-14HPO 150 W 60 W 150 W 60 W 150 W 150 W 150 W 60 W 60 W 30 W 75 W
AGV-20HPO 500 W 200 W 500 W 200 W 500 W 500 W 500 W 200 W 200 W 100 W 250 W
AGV-30HPO - 300 W - 300 W - 750 W - - - 150 W 375 W
Damage Threshold of Coating Pulsed (8 ns) - 2 J/cm2 - 4 J/cm2 - 10 J/cm2 - - 7/3/1.5 J/cm2 -
-
Pulsed (120 ns) - - - - - - - - - 0.8 J/cm2 2 J/cm2
Pulsed (325 fs) 0.10 J/cm2 0.04 J/cm2 0.20 J/cm2 0.08 J/cm2 0.40 J/cm2 0.20 J/cm2 0.30 J/cm2 0.20/0.15
/0.10 J/cm2
- -
-
    1. Partial listing of supported wavelengths. Please consult Aerotech for a complete list of supported wavelengths.
    2. Values shown use the same mirror coating for both 10.6 µm and 9.4 µm wavelengths.

Dimensions

  • AGV-10HPO-RSE
  • AGV-10HPO-LSE
  • AGV-14HPO-RSE
  • AGV-14HPO-LSE
  • AGV-20HPO-RSE
  • AGV-20HPO-LSE
  • AGV-30HPO-RSE
  • AGV-30HPO-LSE

Ordering Information

Ordering Example

AGV-14HPO -RSE -1064-100

Ordering Options

Model Beam Entry OrientationOptics Configuration

AGV-10HPO
AGV-14HPO
AGV-20HPO
AGV-30HPO

-RSE
-LSE
-CO2
-DS
-1552
-1064
-1030
-532
-515
-355
-343
-1064/532/355
-1030/515/343
-355-53T
-343-53T
-1064-100
-532-100
-CO2-100T
-1552-100T
-1064-100T
-1030-100T
-532-100T
-515-100T
-355-100T
-343-100T
-CO2-160
-1064-160
-532-160
-355-160
-343-160
-1064-163
-1552-163T
-1064-163T
-1030-163T
-532-163T
-515-163T
-355-163T
-343-163T
-1064-170
-532-170
-1064-200
-CO2-255
-1064-255
-532-255
-355-255
-343-255
-1064-500

AGV Series Galvanometer Scanner

OptionDescription
AGV-10HPO 2-axis open-frame galvanometer scanner with 10 mm diameter beam aperture and integral high-precision feedback
AGV-14HPO 2-axis open-frame galvanometer scanner with 14 mm diameter beam aperture and integral high-precision feedback
AGV-20HPO 2-axis open-frame galvanometer scanner with 20 mm diameter beam aperture and integral high-precision feedback
AGV-30HPO 2-axis open-frame galvanometer scanner with 30 mm diameter beam aperture and integral high-precision feedback

Beam Entry Orientation

OptionDescription
-RSE Right-side laser beam entry (standard)
-LSE Left-side laser beam entry

Optics Configuration (Partial listing. Please consult Aerotech for other supported wavelengths and lens combinations.)

No lens Options, F-Theta Not Included
Option AGV-10HP AGV-14HP AGV-20HP AGV-30HP
-CO2 Mirrors for 10.6 μm wavelength; no focal lens
-DS Durable silver coated mirrors; 450 nm - 10.6 μm wavelength; limited operating power; no focal lens -
-1552 Mirrors for 1552 nm wavelength; no focal lens -
-1064 Mirrors for 1064 nm wavelength; no focal lens
-1030 Mirrors for 1030 nm wavelength; no focal lens -
-532 Mirrors for 532 nm wavelength; no focal lens
-515 Mirrors for 515 nm wavelength; no focal lens -
-355 Mirrors for 355 nm wavelength; no focal lens
-343 Mirrors for 343 nm wavelength; no focal lens -
-1064/532/355 Mirrors for 1064, 532, and 355 nm wavelengths; no focal lens -
-1030/515/343 Mirrors for 1030, 515, and 343 nm wavelengths; no focal lens -

F-Theta Included Options(1,2)
Option AGV-10HP AGV-14HP AGV-20HP AGV-30HP
-355-53T 355 nm Wavelength
53 mm Focal Length
17.2 x 17.2 mm FOV
Telecentric
355 nm Wavelength
53 mm Focal Length
8.2 x 8.2 mm FOV
Telecentric
- -
-343-53T 343 nm Wavelength
53 mm Focal Length
16.8 x 16.8 mm FOV
Telecentric
343 nm Wavelength
53 mm Focal Length
8.0 x 8.0 mm FOV
Telecentric
- -
-1064-100(3) 1064 nm Wavelength
100 mm Focal Length
66.9 x 66.9 mm FOV
Non-Telecentric
1064 nm Wavelength
100 mm Focal Length
37.0 x 37.0 mm FOV
Non-Telecentric
- -
-532-100(3) 532 nm Wavelength
100 mm Focal Length
57.2 x 57.2 mm FOV
Non-Telecentric
- - -
-CO2-100T -
10.6 μm Wavelength
100 mm Focal Length
50.0 x 50.0 mm FOV
Telecentric
10.6 μm Wavelength
100 mm Focal Length
38.6 x 38.6 mm FOV
Telecentric
-
-1552-100T 1552 nm Wavelength
100 mm Focal Length
55.2 x 55.2 mm FOV
Telecentric
1552 nm Wavelength
100 mm Focal Length
49.4 x 49.4 mm FOV
Telecentric
- -
-1064-100T(3) 1064 nm Wavelength
100 mm Focal Length
69.8 x 69.8 mm FOV
Telecentric
1064 nm Wavelength
100 mm Focal Length
61.6 x 61.6 mm FOV
Telecentric
1064 nm Wavelength
100 mm Focal Length
44.0 x 44.0 mm FOV
Telecentric
-
-1030-100T 1030 nm Wavelength
100 mm Focal Length
41.6 x 41.6 mm FOV
Telecentric
1030 nm Wavelength
100 mm Focal Length
34.8 x 34.8 mm FOV
Telecentric
- -
-532-100T(3) 532 nm Wavelength
100 mm Focal Length
64.6 x 64.6 mm FOV
Telecentric
532 nm Wavelength
100 mm Focal Length
57.0 x 57.0 mm FOV
Telecentric
- -
-515-100T 515 nm Wavelength
100 mm Focal Length
41.4 x 41.4 mm FOV
Telecentric
515 nm Wavelength
100 mm Focal Length
34.6 x 34.6 mm FOV
Telecentric
- -
-355-100T 355 nm Wavelength
100 mm Focal Length
51.6 x 51.6 mm FOV
Telecentric
- - -
-343-100T 343 nm Wavelength
100 mm Focal Length
51.2 x 51.2 mm FOV
Telecentric
- - -
-CO2-160 - 10.6 μm Wavelength
160 mm Focal Length
89.2 x 89.2 mm FOV
Non-Telecentric
10.6 μm Wavelength
160 mm Focal Length
76.0 x 76.0 mm FOV
Non-Telecentric
-
-1064-160(3) 1064 nm Wavelength
160 mm Focal Length
107.6 x 107.6 mm FOV
Non-Telecentric
1064 nm Wavelength
160 mm Focal Length
78.4 x 78.4 mm FOV
Non-Telecentric
- -
-532-160(3) 532 nm Wavelength
160 mm Focal Length
107.0 x 107.0 mm FOV
Non-Telecentric
532 nm Wavelength
160 mm Focal Length
77.2 X 77.2 mm FOV
Non-Telecentric
- -
-355-160 355 nm Wavelength
160 mm Focal Length
92.4 x 92.4 mm FOV
Non-Telecentric
- - -
-343-160 343 nm Wavelength
160 mm Focal Length
92.4 x 92.4 mm FOV
Non-Telecentric
- - -
-1064-163(3) - - 1064 nm Wavelength
163 mm Focal Length
72.4 x 72.4 mm FOV
Non-Telecentric
-
-1552-163T 1552 nm Wavelength
163 mm Focal Length
93.8 x 93.8 mm FOV
Telecentric
1552 nm Wavelength
163 mm Focal Length
87.2 x 87.2 mm FOV
Telecentric
- -
-1064-163T 1064 nm Wavelength
163 mm Focal Length
92.0 x 92.0 mm FOV
Telecentric
1064 nm Wavelength
163 mm Focal Length
85.2 x 85.2 mm FOV
Telecentric
1064 nm Wavelength
163 mm Focal Length
71.6 x 71.6 mm FOV
Telecentric
-
-1030-163T 1030 nm Wavelength
163 mm Focal Length
92.0 x 92.0 mm FOV
Telecentric
1030 nm Wavelength
163 mm Focal Length
85.0 x 85.0 mm FOV
Telecentric
- -
-532-163T 532 nm Wavelength
163 mm Focal Length
79.6 x 79.6 mm FOV
Telecentric
532 nm Wavelength
163 mm Focal Length
66.0 x 66.0 mm FOV
Telecentric
- -
-515-163T 515 nm Wavelength
163 mm Focal Length
79.2 x 79.2 mm FOV
Telecentric
515 nm Wavelength
163 mm Focal Length
65.8 x 65.8 mm FOV
Telecentric
- -
-355-163T 355 nm Wavelength
163 mm Focal Length
80.8 x 80.8 mm FOV
Telecentric
355 nm Wavelength
163 mm Focal Length
74.6 x 74.6 mm FOV
Telecentric
- -
-343-163T 343 nm Wavelength
163 mm Focal Length
80.4 x 80.4 mm FOV
Telecentric
343 nm Wavelength
163 mm Focal Length
74.0 x 74.0 mm FOV
Telecentric
- -
-1064-170(3) - 1064 nm Wavelength
170 mm Focal Length
110.8 x 110.8 mm FOV
Non-Telecentric
- -
-532-170(3) - 532 nm Wavelength
170 mm Focal Length
103.8 x 103.8 mm FOV
Non-Telecentric
- -
-1064-200(3) - - - 1064 nm Wavelength
200 mm Focal Length
68.0 x 68.0 mm FOV
Non-Telecentric
-CO2-255 - - 10.6 μm Wavelength
255 mm Focal Length
163.8 x 163.8 mm FOV
Non-Telecentric
10.6 μm Wavelength
255 mm Focal Length
104.4 x 104.4 mm FOV
Non-Telecentric
-1064-255(3) - - 1064 nm Wavelength
255 mm Focal Length
154.2 x 154.2 mm FOV
Non-Telecentric
1064 nm Wavelength
255 mm Focal Length
91.6 x 91.6 mm FOV
Non-Telecentric
-532-255(3) - - 532 nm Wavelength
255 mm Focal Length
148.0 x 148.0 mm FOV
Non-Telecentric
-
-355-255 355 nm Wavelength
255 mm Focal Length
143 x 143 mm FOV
Non-Telecentric
355 nm Wavelength
255 mm Focal Length
119.4 x 119.4 mm FOV
Non-Telecentric
- -
-343-255 343 nm Wavelength
255 mm Focal Length
142 x 142 mm FOV
Non-Telecentric
343 nm Wavelength
255 mm Focal Length
118.4 x 118.4 mm FOV
Non-Telecentric
- -
-1064-500 - - - 1064 nm Wavelength
500 mm Focal Length
233.2 x 233.2 mm FOV
Non-Telecentric

Notes:

  1. Input beam diameter is assumed to be equal to scan head entrance aperture at 1/e2 Gaussian profile
  2. Reported field size is minimum achievable based on zero beam vignetting.
  3. F-Theta lens is not recommended for use with short pulse lasers (ps and fs pulse durations). Please consult factory for lens options that are compatible with short pulse lasers.

 

Lens Mounting Adapters (order as separate line item)

OptionDescription
LM10HP-XXX Lens mount adapter for AGV-10HP and AGV-10HPO; standard versions support the lens configurations offered by Aerotech; custom versions available on request
LM14HP-XXX Lens mount adapter for AGV-14HP and AGV-14HPO; standard versions support the lens configurations offered by Aerotech; custom versions available on request
LM20HP-XXX Lens mount adapter for AGV-20HP and AGV-20HPO; standard versions support the lens configurations offered by Aerotech; custom versions available on request
LM30HP-XXX Lens mount adapter for AGV-30HP and AGV-30HPO; standard versions support the lens configurations offered by Aerotech; custom versions available on request