ANT20G Single-Axis Direct-Drive Nanopositioning Goniometers

Description

Design Features

  • Noncontact, non-cogging, frictionless direct-drive for zero backlash or hysteresis
  • High speed (150 degrees/s)
  • High resolution (0.05 arc sec)
  • Excellent in-position stability
  • Large 20 degree rotation angle
  • Orthogonal mounting of two cradles provides rotation about the same point
  • No maintenance
  • Compact design

Aerotech's ANT20G goniometers represent a significant breakthrough in the high-accuracy angular alignment of components. This unique design utilizes Aerotech's best-in-class direct-drive noncontact motor technology. When used with Aerotech's controllers, the ANT20G series provides an industry-leading positioning speed of 150 degrees per second.

High-precision bearings, direct on-axis encoder feedback and noncontact and noncogging direct-drive technology ensure the highest level of performance and make excellent repeatability and in-position stability a reality. The goniometer cradles can be mounted orthogonally to provide pitch and roll about the same point in space. Combining this with a rotary stage under the orthogonal assembly adds a third rotation axis (pitch, roll, yaw) through the same point.

The critical elements of the ANT20G goniometers, as with all other ANT series nanopositioners, were selected to operate in a 24/7 manufacturing environment. Unlike worm- or piezo-driven goniometers, the ANT20G series will not require periodic adjustment or maintenance. This will ensure many years of trouble-free operation. The ANT20G cradles are available in four sizes.

Specifications

Mechanical Specifications

ModelANT20G-050ANT20G-090
Rotation Angle 20° 20°
Accuracy(1) ±90 µrad (±18 arc sec) ±50 µrad (±10 arc sec)
Resolution (Minimum Incremental Motion) 0.25 µrad (0.05 arc sec) 0.25 µrad (0.05 arc sec)
Bidirectional Repeatability(1) ±18 µrad (±4 arc sec) ±10 µrad (±2 arc sec)
Unidirectional Repeatability ±5 µrad (±1 arc sec) ±5 µrad (±1 arc sec)
Tilt Error Motion ±90 µrad (±18 arc sec) ±50 µrad (±10 arc sec)
Maximum Speed 150 degrees per second
Maximum Acceleration 1200 rad/s2 500 rad/s2
Settling Time See graph for typical performance
In-Position Stability(2) ±0.4 µrad (±0.08 arc sec) ±0.2 µrad (±0.04 arc sec)
Nominal Radius of Rotation 50 mm 90 mm
Height from Tabletop to Rotation Point 19.1 mm 57.5 mm
Maximum Torque (Continuous) 0.40 N-m 0.85 N-m
Load Capacity Axial 1.5 kg 2.0 kg
Moment 60 kg-mm 80 kg-mm
Stage Mass 0.55 kg 1.1 kg
Material Aluminum
MTBF (Mean Time Between Failure) 30,000 Hours
  1. Certified with each stage.
  2. In-Position Jitter listing is 3 sigma value.
  3. Specifications are per axis, measured at the rotation point. Performance of multi-axis systems is payload and workpoint dependent. Consult factory for multi-axis or non-standard applications.

Mechanical Specifications

ModelANT20G-110ANT20G-160
Rotation Angle 20° 20°
Accuracy(1) ±40 µrad (±8 arc sec) ±30 µrad (±6 arc sec)
Resolution (Minimum Incremental Motion) 0.25 µrad (0.05 arc sec) 0.25 µrad (0.05 arc sec)
Bidirectional Repeatability(1) ±10 µrad (±2 arc sec) ±10 µrad (±2 arc sec)
Unidirectional Repeatability ±5 µrad (±1 arc sec) ±5 µrad (±1 arc sec)
Tilt Error Motion ±40 µrad (±8 arc sec) ±30 µrad (±6 arc sec)
Maximum Speed 150 degrees per second
Maximum Acceleration 375 rad/s2 250 rad/s2
Settling Time See graph for typical performance
In-Position Stability(2) ±0.2 µrad (±0.04 arc sec) ±0.15 µrad (±0.03 arc sec)
Nominal Radius of Rotation 110 mm 160 mm
Height from Tabletop to Rotation Point 76.2 mm 120.4 mm
Maximum Torque (Continuous) 1.00 N-m 2.40 N-m
Load Capacity Axial 2.0 kg 3.5 kg
Moment 80 kg-mm 140 kg-mm
Stage Mass 1.2 kg 1.6 kg
Material Aluminum
MTBF (Mean Time Between Failure) 30,000 Hours
  1. Certified with each stage.
  2. In-Position Jitter listing is 3 sigma value.
  3. Specifications are per axis, measured at the rotation point. Performance of multi-axis systems is payload and workpoint dependent. Consult factory for multi-axis or non-standard applications.

Electrical Specifications

Drive System Slotless, Brushless, Direct Drive
Feedback Noncontact Encoder
Maximum Bus Voltage ±40 VDC
Limit Switches 5 V, Normally Closed
Home Switch Near Center

Recommended Controller

Multi-Axis A3200 Npaq MXR
Npaq MR-MXH
Ndrive ML-MXH
Ensemble Epaq MXH
Epaq MR-MXH
Ensemble ML-MXH
Single Axis Soloist Soloist ML-MXH
  1. Linear amplifiers are required to achieve the listed specifications. Other options are available.
  • ANT20G-090 Step Plot
  • ANT20G Spec Image

Dimensions

  • ANT20G-050
  • ANT20G-090
  • ANT20G-050-090
  • ANT20G-110
  • ANT20G-160
  • ANT20G-110-160

Ordering Information

ANT20G Single-Axis Direct-Drive Nanopositioning Goniometer

Radius of Rotation (Required)

OptionDescription
-050 50 mm radius of rotation
-090 90 mm radius of rotation
-110 110 mm radius of rotation, limits
-160 160 mm radius of rotation, limits

Metrology (Required)

OptionDescription
-PL1 Base performance
-PL2 High-accuracy performance, PLUS

Integration (Required)

Aerotech offers both standard and custom integration services to help you get your system fully operational as quickly as possible. The following standard integration options are available for this system. Please consult Aerotech if you are unsure what level of integration is required, or if you desire custom integration support with your system.
-TAS Integration - Test as system
Testing, integration, and documentation of a group of components as a complete system that will be used together (ex: drive, controller, and stage). This includes parameter file generation, system tuning, and documentation of the system configuration.
-TAC Integration - Test as components
Testing and integration of individual items as discrete components that ship together. This is typically used for spare parts, replacement parts, or items that will not be used together. These components may or may not be part of a larger system.

Accessories (to be ordered as separate line item)

OptionDescription
ALIGN-PA10 XY assembly; 10 arc sec orthogonality
ALIGN-PA5 XY assembly; 5 arc sec orthogonality