HexGen HEX500-350HL Hexapod Six-DOF Positioning System

Description

Design Features

  • Six degree-of-freedom positioning with linear travels to 110 mm and angular travels to 40°
  • Precision design with guaranteed positioning accuracy specifications
  • Minimum incremental motion to 20 nm in XYZ and 0.2 μrad in θxθyθz
  • Flexible configurations and customization
  • Vacuum preparation available upon request
  • Powerful controls and software with visualization of work and tool coordinate systems

Aerotech’s HexGen® hexapods represent the next-generation in six degree-of-freedom (DOF) positioning performance. The HEX500-350HL is a high-load, ultra-precision hexapod ideal for applications in x-ray diffraction, sensor testing, and high-force device manipulation.

Many trade-offs exist in the design and specification of a motion system. With its high-load capacity, large travels, high speeds, and sub-micrometer precision, the HEX500-350HL does not force you to compromise on application specifications.

Superior Structural Design

The HEX500-350HL is actuated with six high-accuracy struts that are built with precision preloaded bearings, ball screws, and drive components. Unlike competitive hexapods driven by DC brushed servomotors, the HEX500-350HL is driven by AC brushless, slotless servomotors that maximize device lifetime and performance. The servomotors are directly coupled to the actuator ball-screw enabling increased drive stiffness, higher positioning accuracy, and better minimum incremental motion (20 nm in XYZ and 0.2 μrad for θxθyθz) when compared to competitive designs that use belts, gearheads, or compliant couplings. The strut pivot-joints are engineered to provide low friction and high stiffness enhancing the overall hexapod performance.

Design Flexibility

The HEX500-350HL is designed with flexibility and customization in mind. The platform and base can be easily modified with user-specific features or mounting patterns. For applications that require different travels or a unique performance parameter, the kinematic and/or structural layout of the design can be customized with that criteria in mind.

The HEX500-350HL is available with an absolute encoder option for applications that demand no movement on start-up or power loss. The base and platform have a 150 mm diameter clear aperture to allow for workpiece access from the bottom. The base is designed with mounting holes to adapt directly to English or metric optical tables. The hexapod can also be vacuum prepared for demanding applications in synchrotron sample or optics adjustment, semiconductor manufacturing and inspection, or satellite sensor testing.

Powerful Controls and Software

Driving the HEX500-350HL is Aerotech’s award-winning A3200 motion control software. Built on years of experience in difficult kinematics applications, the A3200 controller allows simple programming and control of the hexapod in multiple user-defined coordinate systems with an intuitive interface and real-time motion visualization. Aerotech’s free HexGen™ sizing software provides the ability to easily simulate the available travel and workspace of the hexapod.

Specifications

HEX500-350HL Specifications

Mechanical SpecificationsHEX500-350HL
Axis X Y Z A (θx) B (θy) C (θz)
Travel(1) 100 mm 110 mm 54 mm 22 deg 22 deg 40 deg
Axis Positioning Accuracy(2,3) Over Full Travel Standard ±4 μm ±4 μm ±3 μm ±50 μrad
(±10.3 arc-sec)
±50 μrad
(±10.3 arc-sec)
±25 μrad
(±5.2 arc-sec)
ULTRA ±1 μm ±1 μm ±0.75 μm ±10 μrad
(±2.1 arc-sec)
±10 μrad
(±2.1 arc-sec)
±5 μrad
(±1.0 arc-sec)
Over any 20 mm (X, Y, Z) or 5 deg (A, B, C) Standard ±1.25 μm ±1.25 μm ±1.25 μm ±12.5 μrad
(±2.6 arc-sec)
±12.5 μrad
(±2.6 arc-sec)
±7.5 μrad
(±1.5 arc-sec)
ULTRA ±0.75 μm ±0.75 μm ±0.5 μm ±5 μrad
(±1.0 arc-sec)
±5 μrad
(±1.0 arc-sec)
±2.5 μrad
(±0.5 arc-sec)
Resolution (Minimum Incremental Motion) 20 nm 20 nm 20 nm 0.2 μrad
(0.04 arc sec)
0.2 μrad
(0.04 arc sec)
0.2 μrad
(0.04 arc sec)
Bidirectional Repeatability, pk-pk(3) ±0.6 μm ±0.6 μm ±0.35 μm ±1 μrad
(±0.2 arc sec)
±1 μrad
(±0.2 arc sec)
±1 μrad
(±0.2 arc sec)
Unidirectional Repeatability, pk-pk ±0.25 μm ±0.25 μm ±0.15 μm ±0.5 μrad
(±0.1 arc sec)
±0.5 μrad
(±0.1 arc sec)
±0.5 μrad
(±0.1 arc sec)
Maximum Speed(4) 50 mm/s 50 mm/s 25 mm/s 10 deg/s 10 deg/s 20 deg/s
Load Capacity, All Positions(5) Vertical 200 kg (Push); 120 kg (Pull)
Horizontal 35 kg
Holding Capacity, De-Energized(6) 165 kg
Stage Mass 49 kg
Material Anodized Aluminum Platform and Base; Steel Used in Joints and Inside Struts

Note:

  1. Travels are mutually-exclusive. Consult our HexGen Hexapod Sizer for detailed workspace sizing.
  2. Measured with single-axis moves at a height of 50 mm above the moving platform. Results can be payload and workpoint dependent.
  3. X, Y, Z performance certified as standard. X, Y, Z, A, B, C performance certified with ULTRA.
  4. Requires the selection of an appropriate amplifier with sufficient voltage and current.
  5. Centered loading – consult load curves.
  6. Horizontal base plate, centered loading – consult load curves.

Electrical Specifications

Drive System Precision Ball Screw, Brushless Servomotor
Feedback Noncontact Encoder – Incremental and Absolute Options
Maximum Bus Voltage 80 VDC
Limit Switches 5 V, Normally-Closed (Located on Each Strut)

Recommended Controller

Multi-Axis Standard HEX RC
Optional Npaq/Ndrive CP/ Ndrive HLe
  • Accuracy Plot
  • Plots

Dimensions

  • HexGen HEX500-350HL

Ordering Information

HexGen HEX500-350HL

Feedback (Required)

OptionDescription
-E1 Incremental encoders
-E2 Absolute encoders

Performance Grade (Optional)

OptionDescription
-PL3 Base performance
-PL4 Ultra high-accuracy performance, ULTRA

Integration (Required)

Aerotech offers both standard and custom integration services to help you get your system fully operational as quickly as possible. The following standard integration options are available for this system. Please consult Aerotech if you are unsure what level of integration is required, or if you desire custom integration support with your system.
-TAS Integration - Test as system
Testing, integration, and documentation of a group of components as a complete system that will be used together (ex: drive, controller, and stage). This includes parameter file generation, system tuning, and documentation of the system configuration.
-TAC Integration - Test as components
Testing and integration of individual items as discrete components. This is typically used for spare parts, replacement parts, or items that will not be used or shipped together (ex: stage only). These components may or may not be part of a larger system.